Production data based optimal etch time control design for a reactive ion etching process
1999 ◽
Vol 12
(1)
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pp. 139-147
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2006 ◽
Vol 16
(12)
◽
pp. 2570-2575
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1996 ◽
Vol 5
(6-8)
◽
pp. 840-844
◽
2000 ◽
Vol 13
(4)
◽
pp. 469-480
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2013 ◽
Vol 52
(10S)
◽
pp. 10MC04
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