Effect of change in piezoelectric layer thickness in high-overtone bulk acoustic resonator

2013 ◽  
Author(s):  
K. Sandeep Sharma ◽  
Srikanth Enjamuri ◽  
K. C. James Raju
Keyword(s):  
Layer Thickness ◽  
Piezoelectric Layer ◽  
Acoustic Resonator ◽  
High Overtone

Improved Prediction of Electrodes’ Mass Loading Effect on MEMS FBAR Structure in Longitudinal Resonance

2008 ◽  
Author(s):  
Annie Ruimi ◽  
Yueming Liang ◽  
Robert M. McMeeking
Keyword(s):  
Finite Elements ◽  
Aluminum Nitride ◽  
Resonant Frequency ◽  
Layer Thickness ◽  
Piezoelectric Layer ◽  
Numerical Scheme ◽  
Three Dimensional ◽  
Mass Loading ◽  
Loading Effect ◽  
One Dimensional

In this paper, we derive an exact one-dimensional rule for predicting mass loading effect due to electrodes by analyzing a FBAR structure consisting of a piezoelectric layer and two electrodes in longitudinal resonance. We validate the numerical scheme using aluminum nitride as the piezoelectric material and gold and aluminum for the top and bottom electrodes respectively. Results are compared with three-dimensional finite elements simulations obtained earlier. It is seen that the new rule predicts higher values of the resonant frequency and constitutes an improvement over an elementary rule particularly for electrodes thicknesses greater than 20% of the piezoelectric layer thickness.

AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

2013 ◽  
Vol 102 (11) ◽  
pp. 113507 ◽  
Author(s):  
B. P. Sorokin ◽  
G. M. Kvashnin ◽  
A. P. Volkov ◽  
V. S. Bormashov ◽  
V. V. Aksenenkov ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Single Crystalline ◽  
Piezoelectric Structure ◽  
High Overtone

Microwave acoustic properties of diamond single crystal as a substrate for High-overtone Bulk Acoustic Resonator

2013 ◽  
Author(s):  
Boris P. Sorokin ◽  
Gennagy M. Kvashnin ◽  
Alexander P. Volkov ◽  
Vitaly S. Bormashov ◽  
Vitaly V. Aksenenkov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Acoustic Resonator ◽  
Acoustic Properties ◽  
Diamond Single Crystal ◽  
High Overtone
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