Active suppression control of diaphragm-type pneumatic vibration isolators by using FAT-based adaptive controller with fuzzy compensation

Author(s):  
Hung-Yi Chen ◽  
Jin-Wei Liang
Author(s):  
K. Ohi ◽  
M. Mizuno ◽  
T. Kasai ◽  
Y. Ohkura ◽  
K. Mizuno ◽  
...  

In recent years, with electron microscopes coming into wider use, their installation environments do not necessarily give their performance full play. Their environmental conditions include air-conditioners, magnetic fields, and vibrations. We report a jointly developed entirely new vibration isolator which is effective against the vibrations transmitted from the floor.Conventionally, large-sized vibration isolators which need the digging of a pit have been used. These vibration isolators, however, are large present problems of installation and maintenance because of their large-size.Thus, we intended to make a vibration isolator which1) eliminates the need for changing the installation room2) eliminates the need of maintenance and3) are compact in size and easily installable.


2001 ◽  
Author(s):  
Robert G. Morrison ◽  
James W. MaCdonald ◽  
Robert A. Bjork

Sign in / Sign up

Export Citation Format

Share Document