Raman spectroscopy, high pressure phosphine anneal, and the electrical properties of the DRAM capacitor
2017 ◽
Vol 45
(5)
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pp. 423-434
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Keyword(s):
2016 ◽
Vol 63
(13)
◽
pp. 1027-1031
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2012 ◽
Vol 192
◽
pp. 356-359
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1989 ◽
Vol 93
(5)
◽
pp. 1683-1687
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