Evaluating Automated Guided Vehicle System Characteristics in Semiconductor Fab Automated Material Handling Systems

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2019.8791758 ◽

2019 ◽

Author(s):

Karl-Benedikt Reith ◽

Patrick Boden ◽

Martin Daumler ◽

Sebastian Rank ◽

Thorsten Schmidt ◽

...

Keyword(s):

Material Handling ◽

Automated Guided Vehicle ◽

Material Handling Systems ◽

Vehicle System ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

System Characteristics ◽

Automated Guided Vehicle System

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A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

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Framework for the control of automated material-handling systems using the holonic manufacturing approach

International Journal of Production Research ◽

10.1080/00207540410001705284 ◽

2004 ◽

Vol 42 (17) ◽

pp. 3551-3564 ◽

Author(s):

R. F. Babiceanu ◽

F. F. Chen * ◽

R. H. Sturges

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Holonic Manufacturing ◽

Automated Material Handling ◽

Automated Material Handling Systems

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A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) ◽

10.1109/asmc.1999.798193 ◽

2003 ◽

Author(s):

U. Bader ◽

A. Besler ◽

J. Schliesser ◽

J. Dorner

Keyword(s):

Material Handling ◽

Semiconductor Industry ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

Cost Efficient ◽

Modular Simulation

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6 Scheduling in Interbay automated material handling systems

Wafer Fabrication ◽

10.1515/9783110487473-006 ◽

2018 ◽

pp. 135-181

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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5 Scheduling methods of automated material handling systems in SWFSs

Wafer Fabrication ◽

10.1515/9783110487473-005 ◽

2018 ◽

pp. 107-134

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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Automated Material Handling Systems

The Vertical Transportation Handbook ◽

10.1002/9780470172865.ch15 ◽

2007 ◽

pp. 419-450

Author(s):

Wayne A. Gilchrist

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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MaxFlow theory for availability calculation of automated material handling systems

Robotics and Computer-Integrated Manufacturing ◽

10.1016/s0736-5845(02)00071-6 ◽

2003 ◽

Vol 19 (1-2) ◽

pp. 141-145 ◽

Author(s):

Alin Beschorner ◽

Detlev Glüer

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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Using queuing theory to estimate the storage space of stocker in automated material handling systems

Semiconductor Manufacturing Technology Workshop, 2002 ◽

10.1109/smtw.2002.1197380 ◽

2004 ◽

Author(s):

Chia-Wen Yang ◽

Kuo-Sung Huang ◽

Gary Yu ◽

Dong-Yeh Jan

Keyword(s):

Queuing Theory ◽

Material Handling ◽

Storage Space ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs

Proceedings of the 2004 Winter Simulation Conference, 2004. ◽

10.1109/wsc.2004.1371556 ◽

2005 ◽

Author(s):

M.E. Kuhl ◽

J. Christopher

Keyword(s):

Material Handling ◽

Capacity Analysis ◽

Material Handling Systems ◽

Automated Material Handling ◽

Automated Material Handling Systems

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An impending deadlock-free scheduling method in the case of unified automated material handling systems in 300 mm wafer fabrications

Journal of Intelligent Manufacturing ◽

10.1007/s10845-015-1098-5 ◽

2015 ◽

Vol 29 (1) ◽

pp. 155-164 ◽

Author(s):

Qi Zhou ◽

Bing-Hai Zhou

Keyword(s):

Material Handling ◽

Material Handling Systems ◽

Scheduling Method ◽

Automated Material Handling ◽

Automated Material Handling Systems

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