Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560461 ◽

2018 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Rong Su ◽

Yan Qiao

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Efficient Approach to Cyclic Scheduling of Single-Arm Cluster Tools With Chamber Cleaning Operations and Wafer Residency Time Constraint

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2018.2811125 ◽

2018 ◽

Vol 31 (2) ◽

pp. 196-205 ◽

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Kaizhou Gao ◽

Chunjiang Zhang ◽

Yuting Zhu ◽

...

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Efficient Approach ◽

Cluster Tools ◽

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Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets

International Journal of Production Research ◽

10.1080/00207543.2013.774490 ◽

2013 ◽

Vol 51 (16) ◽

pp. 4835-4852 ◽

Author(s):

Ming-Xiang Liu ◽

Bing-Hai Zhou

Keyword(s):

Time Constraint ◽

Scheduling Analysis ◽

Cluster Tools ◽

Residency Constraints ◽

Constraint Sets

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2178023 ◽

2012 ◽

Vol 9 (2) ◽

pp. 446-454 ◽

Author(s):

Nai Qi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Time Constraint ◽

Activity Time ◽

Modeling Analysis ◽

Cluster Tools ◽

And Control ◽

Dual Arm ◽

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2018.2878063 ◽

2019 ◽

Vol 16 (3) ◽

pp. 1373-1386 ◽

Author(s):

Jipeng Wang ◽

Chunrong Pan ◽

Hesuan Hu ◽

Liang Li ◽

Yuan Zhou

Keyword(s):

Cyclic Scheduling ◽

Time Constraints ◽

Cluster Tools ◽

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Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module

2014 IEEE International Conference on Robotics and Automation (ICRA) ◽

10.1109/icra.2014.6907330 ◽

2014 ◽

Author(s):

FaJun Yang ◽

Nai Qi Wu ◽

Yan Qiao ◽

Meng Chu Zhou

Keyword(s):

Cyclic Scheduling ◽

Scheduling Analysis ◽

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Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2160452 ◽

2012 ◽

Vol 9 (1) ◽

pp. 203-209 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Schedulability Analysis ◽

Time Constraint ◽

Optimal Scheduling ◽

Activity Time ◽

Cluster Tools ◽

Dual Arm ◽

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Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints

2013 10th IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC) ◽

10.1109/icnsc.2013.6548746 ◽

2013 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou ◽

QingYun Dai

Keyword(s):

Petri Net ◽

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2009.2039243 ◽

2010 ◽

Vol 23 (1) ◽

pp. 53-64 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Sojourn Time ◽

Time Constraint ◽

Activity Time ◽

Cluster Tools ◽

Dual Arm ◽

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