Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module

2014 IEEE International Conference on Robotics and Automation (ICRA) ◽

10.1109/icra.2014.6907330 ◽

2014 ◽

Author(s):

FaJun Yang ◽

Nai Qi Wu ◽

Yan Qiao ◽

Meng Chu Zhou

Keyword(s):

Cyclic Scheduling ◽

Scheduling Analysis ◽

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Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560461 ◽

2018 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Rong Su ◽

Yan Qiao

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools

2016 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2016.7743574 ◽

2016 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

LiPing Bai ◽

MengChu Zhou

Keyword(s):

Cyclic Scheduling ◽

Scheduling Analysis ◽

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An Event Graph Based Simulation and Scheduling Analysis of Multi-Cluster Tools

Proceedings of the 2004 Winter Simulation Conference, 2004. ◽

10.1109/wsc.2004.1371549 ◽

2005 ◽

Author(s):

Shengwei Ding ◽

Jiangang Yi

Keyword(s):

Scheduling Analysis ◽

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Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets

International Journal of Production Research ◽

10.1080/00207543.2013.774490 ◽

2013 ◽

Vol 51 (16) ◽

pp. 4835-4852 ◽

Author(s):

Ming-Xiang Liu ◽

Bing-Hai Zhou

Keyword(s):

Time Constraint ◽

Scheduling Analysis ◽

Cluster Tools ◽

Residency Constraints ◽

Constraint Sets

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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Non-cyclic scheduling of dual-armed cluster tools for bi-objective minimization of wafer residence time and makespan

2016 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM) ◽

10.1109/ieem.2016.7798031 ◽

2016 ◽

Author(s):

Masaru Sakai ◽

Tatsushi Nishi

Keyword(s):

Residence Time ◽

Cyclic Scheduling ◽

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Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2312192 ◽

2014 ◽

Vol 27 (2) ◽

pp. 192-203 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Cyclic Scheduling ◽

Wafer Fabrication ◽

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Scheduling analysis of time-constrained dual-armed cluster tools

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2003.815203 ◽

2003 ◽

Vol 16 (3) ◽

pp. 521-534 ◽

Author(s):

Ja-Hee Kim ◽

Tae-Eog Lee ◽

Hwan-Yong Lee ◽

Doo-Byeong Park

Keyword(s):

Scheduling Analysis ◽

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Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386329 ◽

2012 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2017.7510772 ◽

2018 ◽

Vol 5 (1) ◽

pp. 270-280 ◽

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Yan Qiao ◽

Rong Su

Keyword(s):

Cyclic Scheduling ◽

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