CMOS-Compatible Mid-Infrared MEMS Thermopile Integrated With an RTD For Flame Sensing In IoT Application

Author(s):  
Jaewoo Lee ◽  
Myeongseok Kwak ◽  
Kanghoon Kim ◽  
J. Im ◽  
J.H. Kim ◽  
...  
Sensors ◽  
2019 ◽  
Vol 19 (11) ◽  
pp. 2513 ◽  
Author(s):  
Christian Ranacher ◽  
Cristina Consani ◽  
Andreas Tortschanoff ◽  
Lukas Rauter ◽  
Dominik Holzmann ◽  
...  

The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si3N4/SiO2 membrane. The detectors have been tested at a wavelength close to the CO2 absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as 5.3 × 10 − 9 W / Hz .


Materials ◽  
2019 ◽  
Vol 12 (6) ◽  
pp. 929 ◽  
Author(s):  
Gerald Pühringer ◽  
Bernhard Jakoby

In this work, we propose and evaluate a concept for a selective thermal emitter based on Tamm plasmons suitable for monolithic on-chip integration and fabrication by conventional complementary metal oxide semiconductor (CMOS)-compatible processes. The original design of Tamm plasmon structures features a purely one-dimensional array of layers including a Bragg mirror and a metal. The resonant field enhancement next to the metal interface corresponding to optical Tamm states leads to resonant emission at the target wavelength, which depends on the lateral dimensions of the bandgap structure. We demonstrate the application of this concept to a silicon slab structure instead of deploying extended one dimensional layers thus enabling coupling into slab waveguides. Here we focus on the mid-infrared region for absorption sensing applications, particularly on the CO2 absorption line at 4.26 µm as an example. The proposed genetic-algorithm optimization process utilizing the finite-element method and the transfer-matrix method reveals resonant absorption in case of incident modes guided by the slab and, by Kirchhoff’s law, corresponds to emittance up to 90% depending on different choices of the silicon slab height when the structure is used as a thermal emitter. Although we focus on the application as an emitter in the present work, the structure can also be operated as an absorber providing adjusted lateral dimensions and/or exchanged materials (e.g., a different choice for metal).


Author(s):  
Romy Fain ◽  
Steven A. Miller ◽  
Mengjie Yu ◽  
Austin G. Griffith ◽  
Jaime Cardenas ◽  
...  

2016 ◽  
Author(s):  
Ehsan Karimi Shahmarvandi ◽  
Mohammadamir Ghaderi ◽  
N. Pelin Ayerden ◽  
Ger de Graaf ◽  
Reinoud F. Wolffenbuttel
Keyword(s):  

2019 ◽  
Vol 11 (21) ◽  
pp. 19647-19653 ◽  
Author(s):  
Haining Chong ◽  
Zemin Xu ◽  
Zhewei Wang ◽  
Jianbo Yu ◽  
Tobias Biesner ◽  
...  

2005 ◽  
Vol 14 ◽  
pp. 337-342 ◽  
Author(s):  
M. Dolci ◽  
G. Valentini ◽  
O. Straniero ◽  
G. Di Rico ◽  
M. Ragni ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document