Usability of ECA materials in high temperature sensor applications

Author(s):  
Sanna Lahokallio ◽  
Laura Frisk
2009 ◽  
Vol 136 (1) ◽  
pp. 52-59 ◽  
Author(s):  
S.J. Skinner ◽  
J.P. Feist ◽  
I.J.E. Brooks ◽  
S. Seefeldt ◽  
A.L. Heyes

2011 ◽  
Vol 679-680 ◽  
pp. 449-452 ◽  
Author(s):  
Walter Daves ◽  
A. Krauss ◽  
Martin Le-Huu ◽  
S. Kronmüller ◽  
Volker Haeublein ◽  
...  

We investigated the performance of different metallization/passivation systems for high temperature applications. The metallizations comprised a 150 nm sputtered Pt or a 150 nm e-beam evaporated PtRh layer on Ti/TiN underlayers, respectively. The passivation coatings consisted of amorphous PECVD SiOx, of amorphous stress-reduced PECVD SiNy, and of a SiOx/ SiNy stack. For samples with SiOx and SiOx/ SiNy passivation layers the electrical properties changed after a short high temperature anneal at 600 °C but then remained stable during further annealing. This was attributed to the formation of PtTi alloys, which stabilized the metallization stack. In samples with SiNy passivation a significant Pt out-diffusion into the passivation layer was observed. This led to a degradation of the electrical and mechanical properties. The best performance was achieved with Pt-based metallizations and SiOx or SiOx/SiNy passivations.


2016 ◽  
Vol 42 (16) ◽  
pp. 19269-19275 ◽  
Author(s):  
Junchao Gao ◽  
Franklin Li Duan ◽  
Chang Yu ◽  
Wentao Meng ◽  
Lizuo Liu ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document