Mechanical Characterization of MEMS-Microphones by Means of Nanoindentation and Coupled Finite Element Analysis

2018 ◽  
Author(s):  
Jan Albrecht ◽  
Marie Weissbach ◽  
Matthias Vobl ◽  
Ulrich Krumbein ◽  
Sven Rzepka
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Mechanical Characterization ◽  
Element Analysis ◽  
Mems Microphones

scholarly journals Mechanical Characterization of Compact Rolled‐up Microtubes Using In Situ Scanning Electron Microscopy Nanoindentation and Finite Element Analysis

2021 ◽  
Vol 23 (8) ◽  
pp. 2170031
Author(s):  
Somayeh Moradi ◽  
Nathanael Jöhrmann ◽  
Dmitriy D. Karnaushenko ◽  
Uwe Zschenderlein ◽  
Daniil Karnaushenko ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Mechanical Characterization ◽  
Element Analysis ◽  
Scanning Electron
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