A prominent characteristic of high-resolution images of 6H-SiC viewed from [110] is a zigzag shape with a period of 6 layers as shown in Fig.1. Sometimes the contrast is same through the 6 layers of (0006) planes (Fig.1a), but in most cases it appears as in Fig.1b -- alternate bright/dark contrast among every three (0006) planes. Alternate bright/dark contrast is most common for the thicker specimens. The SAD patterns of these two types of image are almost same, and there is no indication that the difference results from compositional ordering. O’Keefe et al. concluded this type of alternate contrast was due to crystal tilt in thick parts of the specimen. However, no detailed explanation was given. Images of similar character from Ti3Al, which is also a hexagonal crystal, were reported by Howe et al. Howe attributed the bright/dark contrast among alternate (0002) Ti3Al planes to phase shifts produced by incident beam tilt.
