MEMS resonators are today widely investigated as a desirable alternative to quartz resonators in real-time clock applications, because of their low-cost, integration capability properties. Nevertheless, MEMS resonators performances are still not competitive, especially in terms of frequency stability and device equivalent resistance (and, then, power consumption). We propose a new structure for a MEMS resonator, with a vertical-like transduction mechanism, which exhibits promising features. The vertical resonator can be fabricated with the low-cost, high performance THELMA technology, and it is designed to be efficiently frequency tunable. With respect to the commonly investigated lateral resonators, it is expected to have lower equivalent resistances and improved large-scale repeatability characteristics.
Temperature frequency stability study of extensional mode N-doped silicon MEMS resonator