3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity
2019 ◽
Vol 286
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pp. 123-132
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2020 ◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 47
(3)
◽
pp. 1800-1878
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2001 ◽
Vol 18
(3)
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pp. 335
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Keyword(s):
2014 ◽
Vol 61
(9)
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pp. 1463-1469
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Keyword(s):
2001 ◽
Vol 50
(2)
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pp. 519-521
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