3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity

2019 ◽  
Vol 286 ◽  
pp. 123-132 ◽  
Author(s):  
Zeji Chen ◽  
Fengxiang Wang ◽  
Quan Yuan ◽  
Xiao Kan ◽  
Jinling Yang ◽  
...  
2000 ◽  
Vol 36 (5) ◽  
pp. 480 ◽  
Author(s):  
S. Chang ◽  
A.G. Mann ◽  
A.N. Luiten

2000 ◽  
Vol 25 (17) ◽  
pp. 1228 ◽  
Author(s):  
V. Wulfmeyer ◽  
M. Randall ◽  
A. Brewer ◽  
R. M. Hardesty

Author(s):  
JINCHAO LI ◽  
Zeji Chen ◽  
Wenli Liu ◽  
Jinling Yang ◽  
Yinfang Zhu ◽  
...  

Abstract This work presents a novel ultra-high frequency (UHF) Lamb mode Aluminum Nitride (AlN) piezoelectric resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether support end, the elastic waves leaking from the tether sidewalls can be reflected, which effectively reduces the anchor loss while retaining size compactness and mechanical robustness. Comprehensive analysis was carried out to provide helpful guidance for obtaining optimal slot designs. For various resonators with frequencies ranging from 630 MHz to 1.97 GHz, promising Q enhancements up to 2 times have all been achieved. The 1.97 GHz resonator implemented excellent f × Q product up to 6.72 × 1012 and low motional resistance down to 340 Ω, which is one of the highest performances among the reported devices. The devices with enhanced Q values as well as compact size could have potential application in advanced RF front end transceivers.


2020 ◽  
Author(s):  
Samuel Francis

<p>In this talk, the current status of the LRI instrument will be presented. Topics will include laser frequency stability since launch, current best estimate of the noises in the LRI range spectra, and a look at some high-frequency signals visible in the LRI range measurement.</p>


1999 ◽  
Vol 38 (33) ◽  
pp. 6962 ◽  
Author(s):  
Gianluca Galzerano ◽  
Cesare Svelto ◽  
Elio Bava ◽  
Fabrizio Bertinetto

2015 ◽  
Vol 47 (3) ◽  
pp. 1800-1878 ◽  
Author(s):  
Olivier Lafitte ◽  
Mark Williams ◽  
Kevin Zumbrun

Author(s):  
Akifumi Takamizawa ◽  
Shinya Yanagimachi ◽  
Takehiko Tanabe ◽  
Ken Hagimoto ◽  
Iku Hirano ◽  
...  

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