Application of finite element analysis to the design of quartz thickness-shear mode pressure sensors

In order to investigate the interfacial tuning mechanism of electronic skin (e-skin), several models of the capacitive pressure sensors (CPS) with different microstructures and several sizes of microstructures are constructed through finite element analysis method. The simulative pressure response, the sensitivity, and the linearity of the designed CPS show that the sensor with micropyramids has the best performance in all the designed models. The corresponding theoretically predicted sensitivity is as high as 6.3 × 10−7 fF/Pa, which is about 49 times higher than that without any microstructure. Additionally, these further simulative results show that the smaller the ratios ofL/Hof pyramid, the better the sensitivity but the worse the linearity. When the ratio ofL/Hof pyramid is about2, the sensitivity and the linearity could reach a balance point. The simulative results evidently provide the important theoretically directive significance for the further development ofe-skin.

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Finite element analysis of fiber-optic Fabry–Perot pressure sensors based on silicon diaphragms

Applied Optics ◽

10.1364/ao.58.008465 ◽

2019 ◽

Vol 58 (31) ◽

pp. 8465

Author(s):

Rongkun Wang ◽

Longfei Xiao ◽

Qi Li ◽

Xiangang Xu ◽

Xiufang Chen ◽

...

Keyword(s):

Finite Element Analysis ◽

Finite Element ◽

Fiber Optic ◽

Pressure Sensors ◽

Element Analysis ◽

Fabry Perot

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FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.605.569 ◽

2014 ◽

Vol 605 ◽

pp. 569-572

Author(s):

Pavel Kulha ◽

Igor Laposa ◽

Alexandr Laposa ◽

Miroslav Husák

Keyword(s):

Finite Element ◽

Shear Mode ◽

Mems Devices ◽

Sensitive Layer ◽

Adsorption Effect ◽

Selective Layer ◽

Thickness Shear Mode ◽

Sensing Applications ◽

Simulation Results ◽

Thickness Shear

The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simulation of MEMS devices. Different techniques for simulation of adsorption effect on selective layer were studied: influence of change in mass of the sensitive layer and influence of change in density of the sensitive layer. Analyses of resonant modes were performed for both cases and displacement profiles in selected modes were determined for the resonator under study. Impedance and phase characteristics were calculated and measured for clean sample and sample with selective layer coated. The adsorption model calculates the frequency shift in basic resonant frequency with adsorbed amount of sensed gas. The simulation results were used in design of gas sensors for dangerous substances detection.

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Development of Biocompatible MEMS Wireless Capacitive Pressure Sensor

Journal of Microelectronics and Electronic Packaging ◽

10.4071/1551-4897-2.4.287 ◽

2005 ◽

Vol 2 (4) ◽

pp. 287-296

Author(s):

Shankaran Janardhanan ◽

Joan. Z. Delalic ◽

Jeffrey Catchmark ◽

Dharanipal Saini

Keyword(s):

Finite Element Analysis ◽

Finite Element ◽

Resonant Frequency ◽

Pressure Sensor ◽

Impedance Matching ◽

Pressure Sensors ◽

Important Variable ◽

Bladder Pressure ◽

Capacitive Pressure Sensor ◽

Element Analysis

The objective of this research was to develop a wireless pressure sensor useful for monitoring bladder pressure. The wireless sensor consists of an active capacitive element and an inductor coil. The changes in pressure are related to the changes in the resonant frequency of the internal sensor. The existing pressure sensors have inductors formed on both sides of the substrate. The changes in internal capacitance of these sensors are related to the changes in pressure by impedance matching of the internal LC circuit. The deviation in bladder pressure is an important variable in evaluating the diseased state of the bladder. The inductor designed for this application is a spirally wound inductor fabricated adjacent to the capacitor. The external sensing uses equivalent changes in internal LC. The resonant frequency of the internal sensor is defined by the deformation of the plate, causing the plate to touch the dielectric on the fixed capacitive plate, which is reflected as changes in capacitance(C). The deformation of the plate has been modeled using Finite Element Analysis. The finite element analysis optimizes the dimensions of the design. Remote sensing is achieved through inductive coupling and the changes in pressure are determined. The device is tested for pressures ranging from 0–150 mmHg, bladder pressure. The RF Telemetry system has been modeled using Sonnet. The frequency range is between 100–670 MHz which is in compliance to that specified by Federal Communications Commission (FCC) regulations.

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