A silicon nitride platform by physical vapor deposition for dense wavelength division multiplexing on chip
2009 ◽
Vol 51
(12)
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pp. 2948-2952
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2005 ◽
Vol 22
(2)
◽
pp. 331
◽
2004 ◽
Vol 233
(1-3)
◽
pp. 113-117
◽
2007 ◽
Vol 280
(1)
◽
pp. 33-38
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