Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film <III> The Thickness Effect and Mesoscopic Theory of Conductance Activity Energy

The characters of metal oxide gas sensing nano-thin films are studied. The formula of the dynamical thickness effect characteristic time is given. The relation of the sensitivity Sn and the film thickness l, the character of existing the optimum thickness, the character of the change of conductance activity energy with the film thickness are given also. The idea of diffusion reaction of gas sensing mechanism and the idea of mesoscopic effect in the nano-thin films are proposed.

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Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film Dynamic Thickness Effect and Theory of Diffusion Reaction

2006 IEEE International Conference on Information Acquisition ◽

10.1109/icia.2006.305970 ◽

2006 ◽

Author(s):

Wang Yan ◽

Sun Jingjing ◽

Xing Jianping ◽

Hong Debin ◽

Qiu Nanwan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Gas Sensing ◽

Diffusion Reaction ◽

Thickness Effect

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Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film Optimum Size of Crystal Grains and Theory of Mesoscopic Effect

2006 IEEE International Conference on Information Acquisition ◽

10.1109/icia.2006.305971 ◽

2006 ◽

Cited By ~ 1

Author(s):

Lu Honglang ◽

Sun Jingjing ◽

Xing Jianping ◽

Liu Wenli ◽

Qiu Nanwan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Gas Sensing ◽

Thickness Effect ◽

Optimum Size ◽

Crystal Grains

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Thickness Effect and Mesoscopic Character of the Metal Oxide Gas Sensing Nano-Thin Films

Solid State Phenomena - Nanoscience and Technology ◽

10.4028/3-908451-30-2.1341 ◽

2007 ◽

pp. 1341-1346

Author(s):

Jian Ping Xing ◽

Juan Li ◽

Lei Zhou ◽

Jian Ming Li ◽

Nan Yuan Qiu

Keyword(s):

Thin Films ◽

Metal Oxide ◽

Gas Sensing ◽

Thickness Effect

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Respected Author, Your research paper has been published successfully. Please find the link below. http://ymerdigital.com/current-issue/ Please find the below DOI allocated to your article. 10.37896/YMER20.12/45 OR https://www.doi.org/10.37896/YMER20.12/45 Please find the below attached E- certificates Thanks.

YMER Digital ◽

10.37896/ymer20.12/47 ◽

2021 ◽

Vol 20 (12) ◽

pp. 504-509

Author(s):

C. K Nanhey ◽

◽

M. K Bhanarkar ◽

B. M. Sargar ◽

◽

...

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Current Issue ◽

Gas Sensing ◽

Electrical Characterization ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Sensing Material ◽

Film Development ◽

Sensing Characteristics

Since many years, metal oxide semiconductor has paid too much interest as a gas sensing material by researchers because of wide performance. TiO2 is one of the majority crucial metal oxide which produced better performance in thin film development. Advanced spray pyrolysis system was used to develop thin film. The gas sensing characteristics TiO2 films are evaluated with responses. The gas sensing response, electrical characterization and sensitivity are corporate.

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Gas-Sensing Property Evaluation of Reactively Sputtered Chromium Oxide Thin Films

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.55-57.285 ◽

2008 ◽

Vol 55-57 ◽

pp. 285-288 ◽

Cited By ~ 1

Author(s):

C. Oros ◽

Anurat Wisitsoraat ◽

Pichet Limsuwan ◽

M. Horpathum ◽

V. Patthanasettakul ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Metal Oxide ◽

Chromium Oxide ◽

Flow Rate ◽

Gas Sensing ◽

Oxygen Flow Rate ◽

Oxide Thin Film ◽

Oxide Thin Films ◽

Sensing Applications

Metal oxide thin film materials, including SnO2, TiO2, WO3, MoO3, ZnO, have been widely studied for gas sensing applications. However, new gas-sensing materials with distinct and diverse characteristics for new sensing applications such as electronic nose are still being explored. Presently, gas sensing properties of other metal oxides have not yet been extensively explored. Chromium oxide is an interesting metal oxide for gas sensor because of its temperature stability and moderate electrical conductivity. Nevertheless, there have been very few studies on gas sensing behaviors of this material. In this work, chromium oxide thin films were systematically studied by reactive sputtering with varying sputtering parameter including oxygen flow rate. Structural characterization by means of scanning electron microscopy and X-ray diffraction reveals that the films have sub-micometer grain-size with Rhombohedral phase of Cr2O3. Gas-sensing performances of sputtered chromium oxide thin film have been characterized toward ethanol and acetylene sensing. It was found that chromium oxide thin films exhibit p-type conductivity with increased resistance when exposed to ethanol and acetylene, which are reducing gases. In addition, sensitivity to both acetylene and ethanol tend to improve as oxygen flow rate increases. Furthermore, the chromium oxide thin films exhibit high sensitivity at moderate temperature of 250-300 °C with minimum operating temperature of 200 °C.

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