Intelligent vibration control of micro-cantilever beam in MEMS

2011 ◽  
Author(s):  
Atabak Sarrafan ◽  
Seiyed Hamid Zareh ◽  
Abolghassem Zabihollah ◽  
Amir Ali Khayyat
Keyword(s):  
Vibration Control ◽  
Cantilever Beam ◽  
Micro Cantilever

Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage

2013 ◽  
Vol 300-301 ◽  
pp. 1309-1312
Author(s):  
Ji Long Su ◽  
Yan Jiao Zhang ◽  
Xing Feng Lian
Keyword(s):  
Stress Distribution ◽  
Cantilever Beam ◽  
Electrostatic Force ◽  
Polycrystalline Copper ◽  
Maximum Deflection ◽  
Micro Cantilever ◽  
Fixed End ◽  
The Relationship

The Ansys simulate software is utilized to analyze pull-in voltages and stresses of the fixed end of micro- cantilever beam with different thicknesses respectively. Based on the analysis of the electrostatic force at the pull-in voltage, the stress of fixed end of micro-beam and the maximum deflection are obtained. The relationship between the stress of fixed end and thickness is established. The results show that the mutation thickness of the stress and the pull-in voltage are at and respectively , it is consistent with the intrinsic size of the polycrystalline copper micro-beam.

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