Signal-to-noise ratio estimation technique for SEM image using linear regression

Author(s):  
Z. X. Yeap ◽  
K. S. Sim ◽  
C. P. Tso
Author(s):  
D. C. Joy ◽  
R. D. Bunn

The information available from an SEM image is limited both by the inherent signal to noise ratio that characterizes the image and as a result of the transformations that it may undergo as it is passed through the amplifying circuits of the instrument. In applications such as Critical Dimension Metrology it is necessary to be able to quantify these limitations in order to be able to assess the likely precision of any measurement made with the microscope.The information capacity of an SEM signal, defined as the minimum number of bits needed to encode the output signal, depends on the signal to noise ratio of the image - which in turn depends on the probe size and source brightness and acquisition time per pixel - and on the efficiency of the specimen in producing the signal that is being observed. A detailed analysis of the secondary electron case shows that the information capacity C (bits/pixel) of the SEM signal channel could be written as :


2020 ◽  
Author(s):  
Hao Li ◽  
DeLiang Wang ◽  
Xueliang Zhang ◽  
Guanglai Gao

2013 ◽  
Vol 6 (2) ◽  
pp. 1092-1110 ◽  
Author(s):  
Josselin Garnier ◽  
George Papanicolaou ◽  
Adrien Semin ◽  
Chrysoula Tsogka

Electronics ◽  
2019 ◽  
Vol 8 (10) ◽  
pp. 1139 ◽  
Author(s):  
Kai Yang ◽  
Zhitao Huang ◽  
Xiang Wang ◽  
Fenghua Wang

Signal-to-noise ratio (SNR) is a priori information necessary for many signal processing algorithms or techniques. However, there are many problems exsisting in conventional SNR estimation techniques, such as limited application range of modulation types, narrow effective estimation range of signal-to-noise ratio, and poor ability to accommodate non-zero timing offsets and frequency offsets. In this paper, an SNR estimation technique based on deep learning (DL) is proposed, which is a non-data-aid (NDA) technique. Second and forth moment (M2M4) estimator is used as a benchmark, and experimental results show that the performance and robustness of the proposed method are better, and the applied ranges of modulation types is wider. At the same time, the proposed method is not only applicable to the baseband signal and the incoherent signal, but can also estimate the SNR of the intermediate frequency signal.


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