Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2017.7510772 ◽

2018 ◽

Vol 5 (1) ◽

pp. 270-280 ◽

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Yan Qiao ◽

Rong Su

Keyword(s):

Cyclic Scheduling ◽

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Modeling and Optimal Cyclic Scheduling of Time-Constrained Single-Robot-Arm Cluster Tools via Petri Nets and Linear Programming

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2017.2755599 ◽

2020 ◽

Vol 50 (3) ◽

pp. 871-883 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou ◽

Rong Su ◽

...

Keyword(s):

Linear Programming ◽

Cyclic Scheduling ◽

Robot Arm ◽

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2178023 ◽

2012 ◽

Vol 9 (2) ◽

pp. 446-454 ◽

Author(s):

Nai Qi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Time Constraint ◽

Activity Time ◽

Modeling Analysis ◽

Cluster Tools ◽

And Control ◽

Dual Arm ◽

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Non-cyclic scheduling of dual-armed cluster tools for bi-objective minimization of wafer residence time and makespan

2016 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM) ◽

10.1109/ieem.2016.7798031 ◽

2016 ◽

Author(s):

Masaru Sakai ◽

Tatsushi Nishi

Keyword(s):

Residence Time ◽

Cyclic Scheduling ◽

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Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560461 ◽

2018 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Rong Su ◽

Yan Qiao

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2312192 ◽

2014 ◽

Vol 27 (2) ◽

pp. 192-203 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Cyclic Scheduling ◽

Wafer Fabrication ◽

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Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

IEEE Access ◽

10.1109/access.2016.2549546 ◽

2016 ◽

Vol 4 ◽

pp. 2096-2109 ◽

Author(s):

Qinghua Zhu ◽

Naiqi Wu ◽

Yan Qiao ◽

Mengchu Zhou

Keyword(s):

Optimal Scheduling ◽

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A Branch and Bound Algorithm for Cyclic Scheduling of Timed Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2013.2285221 ◽

2015 ◽

Vol 12 (1) ◽

pp. 309-323 ◽

Author(s):

Chihyun Jung ◽

Hyun-Jung Kim ◽

Tae-Eog Lee

Keyword(s):

Branch And Bound ◽

Cyclic Scheduling ◽

Branch And Bound Algorithm ◽

Timed Petri Nets

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Timed Petri nets in modeling and analysis of cluster tools

IEEE Transactions on Robotics and Automation ◽

10.1109/70.964658 ◽

2001 ◽

Vol 17 (5) ◽

pp. 562-575 ◽

Author(s):

W.M. Zuberek

Keyword(s):

Timed Petri Nets ◽

Modeling And Analysis ◽

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Cyclic Scheduling of Multi-Cluster Tools Based on Mixed Integer Programming

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2017.2733559 ◽

2017 ◽

Vol 30 (4) ◽

pp. 515-525 ◽

Author(s):

Tianpegn Bao ◽

Huangang Wang

Keyword(s):

Integer Programming ◽

Mixed Integer Programming ◽

Cyclic Scheduling ◽

Mixed Integer ◽

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Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2016.2531697 ◽

2017 ◽

Vol 47 (11) ◽

pp. 2920-2932 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Cyclic Scheduling

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