Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

2014 ◽  
Vol 27 (2) ◽  
pp. 192-203 ◽  
Author(s):  
FaJun Yang ◽  
NaiQi Wu ◽  
Yan Qiao ◽  
MengChu Zhou
Keyword(s):  
Petri Net ◽  
Cyclic Scheduling ◽  
Wafer Fabrication ◽  
Cluster Tools

Capacity Planning for Cluster Tools of Wafer Fabrication Plant

2010 ◽  
Vol 450 ◽  
pp. 365-368
Author(s):  
James C. Chen ◽  
Chia Wen Chen ◽  
Kou Huang Chen ◽  
Chien Hsin Lin
Keyword(s):  
Capacity Planning ◽  
Production Costs ◽  
Wafer Fabrication ◽  
Total Production ◽  
Output Rate ◽  
Cluster Tools ◽  
And Performance ◽  
Using Data ◽  
Capital Intensive

Wafer fabrication is a capital intensive industry. A 12-inch wafer fabrication plant needs a typical investment of US$ 3 billion, and the equipment cost constitutes about two-thirds to three-quarters of the total production costs. Therefore, capacity planning is crucial to the investment and performance of wafer fabrication plants. Several formulae are presented to calculate the required number of machines with sequential, parallel, and batch processing characteristics, respectively. An AutoSched AP simulation model using data from real foundry fabrication plants is used in a case study to evaluate the performance of the proposed formulae. Simulation results indicate that the proposed formulae can quickly and accurately calculate the required number of cluster tools leading to the required monthly output rate.

scholarly journals A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

2013 ◽  
Vol 43 (5) ◽  
pp. 1182-1194 ◽  
Author(s):  
NaiQi Wu ◽  
MengChu Zhou ◽  
Feng Chu ◽  
Chengbin Chu
Keyword(s):  
Petri Net ◽  
Scheduling Strategy ◽  
Cluster Tools ◽  
Dual Arm

Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication

2001 ◽  
Vol 17 (5) ◽  
pp. 619-636 ◽  
Author(s):  
Jyh-Horn Chen ◽  
Li-Chen Fu ◽  
Ming-Hung Lin ◽  
An-Chih Huang
Keyword(s):  
Performance Evaluation ◽  
Petri Net ◽  
Wafer Fabrication ◽  
And Performance
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