OES structural feature based fault detection method for plasma etching

Author(s):  
Lihui Zhao ◽  
Huangang Wang ◽  
Wenli Xu
2010 ◽  
Vol 23 (2) ◽  
pp. 273-283 ◽  
Author(s):  
Jong Myoung Ko ◽  
Chang Ouk Kim ◽  
Seung Jun Lee ◽  
Joo Pyo Hong

Author(s):  
Yimin Chen ◽  
Jin Wen ◽  
L. James Lo

Abstract In a heating, ventilation and air conditioning (HVAC) system, a whole building fault (WBF) refers to a fault that occurs in one component but may trigger additional faults/abnormalities on different components or subsystems resulting in impacts on the energy consumption or indoor air quality in buildings. At the whole building level, interval data collected from various components/subsystems can be employed to detect WBFs. In the Part I of this study, a novel data-driven method which includes weather and schedule-based Pattern Matching (WPM) procedure and a feature based principal component analysis PCA (FPCA) procedure was developed to detect the WBF. This article is the second of a two-part study of the development of the whole building fault detection method. In the Part II of the study (this paper), various WBFs were designed and imposed in the HVAC system of a campus building. Data from both imposed fault and naturally-occurred faults were collected through the Building Automation System to evaluate the developed fault detection method. Evaluation results show that the developed WPM-FPCA method reaches a high detection rate and a low false alarm rate.


Author(s):  
Weihai Sun ◽  
Lemei Han

Machine fault detection has great practical significance. Compared with the detection method that requires external sensors, the detection of machine fault by sound signal does not need to destroy its structure. The current popular audio-based fault detection often needs a lot of learning data and complex learning process, and needs the support of known fault database. The fault detection method based on audio proposed in this paper only needs to ensure that the machine works normally in the first second. Through the correlation coefficient calculation, energy analysis, EMD and other methods to carry out time-frequency analysis of the subsequent collected sound signals, we can detect whether the machine has fault.


2010 ◽  
Vol 24 (2) ◽  
pp. 131-136 ◽  
Author(s):  
Ze Cheng ◽  
Bingfeng Li ◽  
Li Liu ◽  
Yanli Liu

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