MASH2-0 electromechanical sigma-delta modulator for capacitive mems sensors with digital filter calibration using Simulated Annealing

2015 ◽  
Author(s):  
Bader Almutairi ◽  
Ali Alshehri ◽  
Michael Kraft
Keyword(s):  
Simulated Annealing ◽  
Digital Filter ◽  
Mems Sensors ◽  
Sigma Delta Modulator ◽  
Sigma Delta ◽  
Capacitive Mems

scholarly journals Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors

Sensors ◽  
2011 ◽  
Vol 11 (10) ◽  
pp. 9217-9232 ◽  
Author(s):  
Reuben Wilcock ◽  
Michael Kraft
Keyword(s):  
Genetic Algorithm ◽  
Mems Sensors ◽  
Sigma Delta Modulator ◽  
Sigma Delta

A digital readout interface for a surface micromachined MEMS accelerometer with a novel loop compensator

2020 ◽  
Vol 34 (27) ◽  
pp. 2050302
Author(s):  
Dongliang Chen ◽  
Liang Yin ◽  
Qiang Fu ◽  
Yufeng Zhang ◽  
Xiaowei Liu
Keyword(s):  
Quantization Noise ◽  
Test Results ◽  
Digital Readout ◽  
Sigma Delta Modulator ◽  
Sigma Delta ◽  
Mems Accelerometer ◽  
Servo Loop ◽  
Capacitive Mems ◽  
The Stability ◽  
Better Than

This paper proposes a novel digital readout interface for capacitive MEMS accelerometer. The digitalization is fulfilled by incorporating a 1-bit [Formula: see text] (sigma-delta) modulator into the closed servo loop. It both realizes a direct digital output efficiently and linearizes the electrostatic feedback force. To maintain the stability and improve loop linearity, a discrete-time proportional integral and differential (PID) compensator is used. It improves the in-band gain, enhances quantization noise suppressing ability and maintain the high-frequency phase margin at the same time. Thus the linearity and noise performance are improved. The whole chip is fabricated using 0.35 [Formula: see text]m CMOS-BCD technology. Test results show that, the linearity is better than 0.1% and the noise floor is as low as 1 [Formula: see text]g/[Formula: see text].

Sensor Signal Digitization Utilizing a Band-Pass Sigma-Delta Modulator

2009 ◽  
Vol E92-C (6) ◽  
pp. 860-863 ◽  
Author(s):  
Lukas FUJCIK ◽  
Linus MICHAELI ◽  
Jiri HAZE ◽  
Radimir VRBA
Keyword(s):  
Sensor Signal ◽  
Sigma Delta Modulator ◽  
Sigma Delta ◽  
Band Pass
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