A new kind of low temperature plasma power supply used for the surface processing of fabric is introduced in this paper. According to the textile surface treatment process, a kind of stable, uniform, soft and low temperature plasma is produced. High voltage power supply use Buck DC/DC transforming circuit in the preceding stage, H bridge inverter in the backward stage. After the step-up transformer, a plasma beam is produced whose peak amplitude 20kV, rated current 100mA. But use the common power supply, some problems such as filament discharge will occurred in the process of fabric surface treatment, and this will leads fabric perforation and injury problems. So this power supply using advanced computer control technology to realize the automatic adjustment, and this improves the reliability of the power supply. The application of the technology of plasma high frequency high voltage power supply in textile materials in the practical application results shows that: the power can effectively inhibits filament discharge, even if the filament discharge occurrences, the discharge energy is insufficient to cause the perforation and damage of the treatment fabric. and the performance of the textile material surface treatment is improved.