Simulation of two-dimensional implantation profiles with a large concentration range in crystalline silicon using an advanced Monte Carlo method
Keyword(s):
1990 ◽
Vol 48
(4)
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pp. 140-141
1993 ◽
pp. 361-364
Keyword(s):
Keyword(s):
1995 ◽
Vol 78
(3-4)
◽
pp. 759-798
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2017 ◽
Vol 200
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pp. 225-233
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