Fast first-run silicon repair cases by laser chemical vapor deposition of copper from Cu(hfac)tmvs

2002 ◽  
Author(s):  
J. Remes ◽  
H. Moilanen ◽  
S. Leppavuori
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

scholarly journals Influence of oxygen partial pressure on SmBa2Cu3O7-δ film deposited by laser chemical vapor deposition

2020 ◽  
pp. 1-11
Author(s):  
Ting Wang ◽  
Rong Tu ◽  
Canlin Zhang ◽  
Song Zhang ◽  
Kaidong Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

ArF excimer laser chemical vapor deposition a-Si:H/a-AlxO1−x superlattices

1992 ◽  
Vol 218 (1-2) ◽  
pp. 62-67
Author(s):  
K. Uwasawa ◽  
F. Ishihara ◽  
S. Matsumoto
Keyword(s):  
Chemical Vapor Deposition ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Arf Excimer Laser

Temperature controlled laser chemical vapor deposition (LCVD) using thermal imaging

2005 ◽  
Vol 25 (4) ◽  
pp. 293-299 ◽  
Author(s):  
Daniel Jean ◽  
W. Jack Lackey ◽  
Chad E. Duty
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Thermal Imaging ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Temperature Controlled

High‐speed laser chemical vapor deposition of copper: A search for optimum conditions

1989 ◽  
Vol 65 (6) ◽  
pp. 2470-2474 ◽  
Author(s):  
B. Markwalder ◽  
M. Widmer ◽  
D. Braichotte ◽  
H. van den Bergh
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Optimum Conditions ◽  
Laser Chemical Vapor Deposition

Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane without H2

2017 ◽  
Vol 101 (4) ◽  
pp. 1471-1478 ◽  
Author(s):  
Qingfang Xu ◽  
Peipei Zhu ◽  
Qingyun Sun ◽  
Rong Tu ◽  
Song Zhang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Formation ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor

2013 ◽  
Vol 365 ◽  
pp. 1-5 ◽  
Author(s):  
Yu You ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Aln Film

Fractal growth of sp3-bonded 5H-BN microcones by plasma-assisted laser chemical vapor deposition

2006 ◽  
Vol 99 (12) ◽  
pp. 123512 ◽  
Author(s):  
Shojiro Komatsu ◽  
Daisuke Kazami ◽  
Hironori Tanaka ◽  
Yusuke Moriyoshi ◽  
Masaharu Shiratani ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Fractal Growth

Impedance spectroscopy of Ba4Ti13O30 film prepared by laser chemical vapor deposition

2012 ◽  
Vol 28 (2-3) ◽  
pp. 197-201 ◽  
Author(s):  
Dongyun Guo ◽  
Takashi Goto ◽  
Chuanbin Wang ◽  
Qiang Shen ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Impedance Spectroscopy ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition
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