Single mask fabrication process of vacuum microelectronics components and preliminary characterization results

2006 ◽  
Author(s):  
A. Phommahaxay ◽  
G. Lissorgues ◽  
T. Bourouina ◽  
P. Nicole
Keyword(s):  
Fabrication Process ◽  
Preliminary Characterization ◽  
Vacuum Microelectronics ◽  
Mask Fabrication

scholarly journals Additively Manufactured Al/SiC Cylindrical Structures by Laser Metal Deposition

Materials ◽  
2020 ◽  
Vol 13 (15) ◽  
pp. 3331 ◽  
Author(s):  
Ainhoa Riquelme ◽  
Pilar Rodrigo ◽  
María Dolores Escalera-Rodríguez ◽  
Joaquín Rams
Keyword(s):  
Wear Resistance ◽  
Powder Metallurgy ◽  
Wear Behavior ◽  
Metal Deposition ◽  
Fabrication Process ◽  
Laser Metal Deposition ◽  
Composite Matrix ◽  
Cylindrical Structures ◽  
Preliminary Characterization

Preliminary characterization of the microstructure of Al/SiCp composites prepared by Laser Metal Deposition (LMD) was analyzed, and the microhardness and wear behavior of the materials manufactured have been evaluated. It has been determined that the combined effect of the laser speed and power is decisive for the fabrication process. The microstructure characterization shows that the presence of hygroscopic Al4C3 can be avoided by adding Ti to the composite matrix. The wear behavior of the LMD samples and their microhardness have been compared with Powder Metallurgy samples with the same composition. The LMD samples showed higher hardness and wear resistance.

Silicon IC compatible LIGA mask-fabrication process

1997 ◽  
Vol 4 (1) ◽  
pp. 7-11 ◽  
Author(s):  
K. Suzuki ◽  
S. Sugiyama
Keyword(s):  
Fabrication Process ◽  
Mask Fabrication

scholarly journals Photolithographic Mask Fabrication Process Using Cr/Sapphire Carriers

2019 ◽  
Vol 17 (3) ◽  
Author(s):  
Agnieszka Zawadzka ◽  
Joanna Prazmowska ◽  
Regina Paszkiewicz
Keyword(s):  
Fabrication Process ◽  
Mask Fabrication

High performance mask fabrication process for the next-generation mask production

2014 ◽  
Author(s):  
Keisuke Yagawa ◽  
Kunihiro Ugajin ◽  
Machiko Suenaga ◽  
Yoshihito Kobayashi ◽  
Takeharu Motokawa ◽  
...  
Keyword(s):  
High Performance ◽  
Fabrication Process ◽  
Next Generation ◽  
Mask Fabrication

scholarly journals Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1087
Author(s):  
Alessio Buzzin ◽  
Serena Cupo ◽  
Ennio Giovine ◽  
Giampiero de Cesare ◽  
Nicola Pio Belfiore
Keyword(s):  
Aspect Ratio ◽  
Degrees Of Freedom ◽  
Fabrication Process ◽  
Design Approach ◽  
Curved Beams ◽  
Sem Images ◽  
Flexure Hinges ◽  
Comb Drives ◽  
Mask Fabrication

This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) μm2, an active clamping area of (2 × 4) μm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.

Self-aligned single-mask fabrication process for electro-thermal microactuators using ICP-RIE

2013 ◽  
Author(s):  
Ali B. Alamin Dow ◽  
Adel Gougam ◽  
Nazir P. Kherani ◽  
I. W. Rangelow
Keyword(s):  
Fabrication Process ◽  
Mask Fabrication
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