Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS

2002 ◽  
Author(s):  
S. Yoshikawa ◽  
F. Toujou ◽  
Y. Homma ◽  
H. Takenaka ◽  
S. Hayashi ◽  
...  
Keyword(s):  
Reference Materials ◽  
Depth Profiling ◽  
Shallow Depth

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

2004 ◽  
Vol 231-232 ◽  
pp. 649-652 ◽  
Author(s):  
F. Toujou ◽  
S. Yoshikawa ◽  
Y. Homma ◽  
A. Takano ◽  
H. Takenaka ◽  
...  
Keyword(s):  
Reference Materials ◽  
Depth Profiling ◽  
Round Robin ◽  
Shallow Depth ◽  
Round Robin Test

Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

2008 ◽  
Vol 255 (4) ◽  
pp. 1311-1315 ◽  
Author(s):  
M. Tomita ◽  
H. Tanaka ◽  
M. Koike ◽  
T. Kinno ◽  
Y. Hori ◽  
...  
Keyword(s):  
Reference Materials ◽  
Depth Profiling ◽  
Shallow Depth

A mathematical model for deep ion implantation depth profiling by synchrotron radiation grazing-incidence X-ray fluorescence spectrometry

2020 ◽  
Vol 35 (12) ◽  
pp. 2964-2973
Author(s):  
Mateusz Czyzycki ◽  
Mike Kokkoris ◽  
Andreas-Germanos Karydas
Keyword(s):  
Mathematical Model ◽  
Synchrotron Radiation ◽  
Ion Implantation ◽  
Standing Wave ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Shallow Depth ◽  
X Ray ◽  
Implantation Depth ◽  
Depth Distributions

Grazing-incidence X-ray fluorescence is applied to obtain shallow depth distributions using the X-ray standing wave (XSW). A new XSW-free mathematical model is proposed that allows the quantitative derivation of much deeper depth distributions.

Transient effects in ultra shallow depth profiling of silicon by secondary ion mass spectrometry

2000 ◽  
Vol 113 (22) ◽  
pp. 10344-10352 ◽  
Author(s):  
P. A. W. van der Heide ◽  
M. S. Lim ◽  
S. S. Perry ◽  
J. W. Rabalais
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Shallow Depth ◽  
Transient Effects ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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