Ultra-shallow depth profiling with secondary ion mass spectrometry

2004 ◽  
Vol 22 (1) ◽  
pp. 317 ◽  
Author(s):  
M. Tomita ◽  
C. Hongo ◽  
M. Suzuki ◽  
M. Takenaka ◽  
A. Murakoshi
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Shallow Depth ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Transient effects in ultra shallow depth profiling of silicon by secondary ion mass spectrometry

2000 ◽  
Vol 113 (22) ◽  
pp. 10344-10352 ◽  
Author(s):  
P. A. W. van der Heide ◽  
M. S. Lim ◽  
S. S. Perry ◽  
J. W. Rabalais
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Shallow Depth ◽  
Transient Effects ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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