Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes

2007 ◽  
Vol 16 (5) ◽  
pp. 1243-1253 ◽  
Author(s):  
X. Rottenberg ◽  
I. De Wolf ◽  
B.K.J.C. Nauwelaers ◽  
W. De Raedt ◽  
H.A.C. Tilmans
Keyword(s):  
Analytical Model ◽  
Mems Devices ◽  
Dielectric Charging ◽  
Electrostatic Mems

Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

2010 ◽  
Vol 50 (9-11) ◽  
pp. 1615-1620 ◽  
Author(s):  
U. Zaghloul ◽  
M. Koutsoureli ◽  
H. Wang ◽  
F. Coccetti ◽  
G. Papaioannou ◽  
...  
Keyword(s):  
Mems Devices ◽  
Dielectric Charging ◽  
Characterization Techniques

Tele-Operated Microsystems Laboratory

2009 ◽  
Author(s):  
Ganapathy Sivakumar ◽  
Matt Mulsow ◽  
Aaron Mellinger ◽  
Shelby Lacouture ◽  
Tim Dallas
Keyword(s):  
Laboratory Testing ◽  
Main Idea ◽  
Mems Devices ◽  
Internet Connectivity ◽  
Detailed Understanding ◽  
Micro Scale ◽  
Electrostatic Mems ◽  
Mems Device ◽  
Networking Technologies ◽  
Two Degree Of Freedom

This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.

scholarly journals A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

2008 ◽  
Vol 44 (6) ◽  
pp. 1610-1613 ◽  
Author(s):  
Min Li ◽  
Dong-Hun Kim ◽  
D.A. Lowther ◽  
J.K. Sykulski
Keyword(s):  
Mems Devices ◽  
Electrostatic Mems ◽  
Sensitivity Approach ◽  
Force Calculation

Dielectric charging control for electrostatic MEMS switches

2010 ◽  
Author(s):  
Manuel Domínguez ◽  
David López ◽  
David Molinero ◽  
Joan Pons-Nin
Keyword(s):  
Mems Switches ◽  
Dielectric Charging ◽  
Electrostatic Mems ◽  
Charging Control

Precise Positioning of Electrostatic MEMS: A Non-Contacting Approach

2009 ◽  
Author(s):  
I. P. M. Wickramasinghe ◽  
Ganapathy S. Sivakumar ◽  
Jordan M. Berg ◽  
Timothy E. J. Dallas
Keyword(s):  
Extremum Seeking ◽  
Mems Devices ◽  
Mechanical Contact ◽  
Device Structure ◽  
Precise Positioning ◽  
Extremum Seeking Control ◽  
Movable Electrode ◽  
Electrostatic Mems ◽  
Alternative Approach ◽  
Mutual Capacitance

Previously, precise positioning of electrostatic MEMS devices has been achieved using mechanical contact between movable and fixed components. A disadvantage of this approach is that stiction at the contact may eventually lead to device failure. This paper presents an alternative approach, whereby a desired configuration is defined by the intersection of two comb structures—one movable and the other fixed. Extremum-seeking control drives the movable electrode to this desired configuration by maximizing the mutual capacitance between the two comb structures. As in the case of mechanical contact, the device structure primarily determines the actuated configuration rather than precise sensing or actuation. However, because the comb structures never physically contact each other, stiction failure is eliminated.

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