Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2020.3022765 ◽

2020 ◽

Vol 29 (6) ◽

pp. 1473-1482

Author(s):

Jeremy Yang ◽

Benoit Hamelin ◽

Farrokh Ayazi

Keyword(s):

Acoustic Wave ◽

Elastic Anisotropy ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.953 ◽

2008 ◽

Vol 55 (11) ◽

pp. 2463-2468 ◽

Author(s):

A. Artieda ◽

P. Muralt

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Composite Thin Film ◽

Bulk Acoustic Wave ◽

High Q ◽

Film Bulk ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Extremely high Q-factor mechanical modes in quartz bulk acoustic wave resonators at millikelvin temperature

10.1063/1.4903104 ◽

2014 ◽

Author(s):

M. Goryachev ◽

D. L. Creedon ◽

E. N. Ivanov ◽

S. Galliou ◽

R. Bourquin ◽

...

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Q Factor ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators ◽

Millikelvin Temperature

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Quality factor boosting of bulk acoustic wave resonators based on a two dimensional array of high-Q resonant tanks

Applied Physics Letters ◽

10.1063/5.0007418 ◽

2020 ◽

Vol 116 (16) ◽

pp. 163502

Author(s):

Gayathri Pillai ◽

Sheng-Shian Li

Keyword(s):

Acoustic Wave ◽

Quality Factor ◽

Bulk Acoustic Wave ◽

Two Dimensional ◽

Dimensional Array ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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GHz High-$Q$ Lateral Overmoded Bulk Acoustic-Wave Resonators Using Epitaxial SiC Thin Film

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2011.2179017 ◽

2012 ◽

Vol 21 (2) ◽

pp. 253-255 ◽

Author(s):

Songbin Gong ◽

Nai-Kuei Kuo ◽

Gianluca Piazza

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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High-Q UHF and SHF Bulk Acoustic Wave Resonators with Ten-Nanometer Hf0.5Zr0.5O2 Ferroelectric Transducer

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808308 ◽

2019 ◽

Author(s):

Mayur Ghatge ◽

Glen Walters ◽

Toshikazu Nishida ◽

Roozbeh Tabrizian

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

High Q ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Gallium arsenide bulk acoustic wave resonators fabricated using sol-gel technology

Electronics Letters ◽

10.1049/el:19930419 ◽

1993 ◽

Vol 29 (7) ◽

pp. 626 ◽

Author(s):

Z. Awang ◽

R.E. Miles

Keyword(s):

Gallium Arsenide ◽

Acoustic Wave ◽

Sol Gel ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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All‐Epitaxial Bulk Acoustic Wave Resonators

physica status solidi (a) ◽

10.1002/pssa.201900786 ◽

2020 ◽

Vol 217 (7) ◽

pp. 1900786

Author(s):

Jeffrey Miller ◽

John Wright ◽

Huili Grace Xing ◽

Debdeep Jena

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

Applied Physics Letters ◽

10.1063/1.4899067 ◽

2014 ◽

Vol 105 (16) ◽

pp. 162910 ◽

Author(s):

Andrey Kozyrev ◽

Anatoly Mikhailov ◽

Sergey Ptashnik ◽

Peter K. Petrov ◽

Neil Alford

Keyword(s):

Thin Film ◽

Acoustic Wave ◽

Normal Mode ◽

Bulk Acoustic Wave ◽

Multilayer Thin Film ◽

Mode Excitation ◽

Film Bulk ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

Applied Physics Letters ◽

10.1063/5.0045232 ◽

2021 ◽

Vol 118 (11) ◽

pp. 114002

Author(s):

B. Jiang ◽

N. P. Opondo ◽

S. A. Bhave

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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Fundamental-Mode Pierce Oscillators Utilizing Bulk-Acoustic-Wave Resonators in the 250 - 300 MHz Range

10.1109/mwsym.1984.1131697 ◽

2005 ◽

Author(s):

S.G. Burns ◽

R.S. Ketcham

Keyword(s):

Acoustic Wave ◽

Fundamental Mode ◽

Bulk Acoustic Wave ◽

Acoustic Wave Resonators ◽

Bulk Acoustic Wave Resonators

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