Tuning effective metal gate work function by a novel gate dielectric HfLaO for nMOSFETs

2006 ◽  
Vol 27 (1) ◽  
pp. 31-33 ◽  
Author(s):  
X.P. Wang ◽  
Ming-Fu Li ◽  
C. Ren ◽  
X.F. Yu ◽  
C. Shen ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Dielectric ◽  
Metal Gate ◽  
Gate Work Function

Gate-dielectric permitivity and metal-gate work-function tradeoff in L/sub met/=25nm PDSOI device characteristics

2006 ◽  
Vol 27 (6) ◽  
pp. 505-507 ◽  
Author(s):  
Dechao Guo ◽  
A. Bryant ◽  
Xinlin Wang ◽  
S. Narasimha ◽  
R. Miller ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Dielectric ◽  
Metal Gate ◽  
Dielectric Permitivity ◽  
Gate Work Function

scholarly journals Performance Evaluation of FD-SOI MOSFETS for Different Metal Gate Work Function

2011 ◽  
Vol 2 (1) ◽  
pp. 11-24 ◽  
Author(s):  
Deepesh Ranka ◽  
Ashwani K. Rana ◽  
Rakesh Kumar Yadav ◽  
Kamalesh Yadav ◽  
Devendra Giri
Keyword(s):  
Performance Evaluation ◽  
Work Function ◽  
Metal Gate ◽  
Gate Work Function

Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

2010 ◽  
Vol 87 (9) ◽  
pp. 1805-1807 ◽  
Author(s):  
Zilan Li ◽  
Tom Schram ◽  
Thomas Witters ◽  
Joshua Tseng ◽  
Stefan De Gendt ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Oxygen Incorporation ◽  
Integration Approach ◽  
Work Function Tuning ◽  
Gate Work Function

Metal gate work function extraction using Fowler-Nordheim tunneling techniques

2005 ◽  
Vol 80 ◽  
pp. 280-283 ◽  
Author(s):  
G. Sjöblom ◽  
L. Pantisano ◽  
T. Schram ◽  
J. Olsson ◽  
V. Afanas’ev ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Nordheim Tunneling ◽  
Gate Work Function
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