Nanoscale p-MOS Thin-Film Transistor With TiN Gate Electrode Fabricated by Low-Temperature Microwave Dopant Activation
2010 ◽
Vol 31
(5)
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pp. 437-439
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2007 ◽
Vol 124-126
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pp. 259-262
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2003 ◽
Vol 24
(9)
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pp. 574-576
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2007 ◽
Vol 28
(1)
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pp. 39-41
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2013 ◽
Vol 13
(5)
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pp. 3313-3316
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