Optimization of excimer laser annealing on low temperature polysilicon for thin film transistor applications

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

Excimer Laser Annealing for Low-Temperature Polysilicon Thin Film Transistor Fabrication on Plastic Substrates

10.1109/rtp.2007.4383858 ◽

2007 ◽

Cited By ~ 2

Author(s):

G. Fortunato ◽

A. Pecora ◽

L. Maiolo ◽

M. Cuscuna ◽

D. Simeone ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Laser Annealing ◽

Thin Film Transistor ◽

Excimer Laser Annealing ◽

Plastic Substrates ◽

Transistor Fabrication

Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor

10.1143/jjap.30.3700 ◽

1991 ◽

Vol 30 (Part 1, No. 12B) ◽

pp. 3700-3703 ◽

Cited By ~ 116

Author(s):

Hiroyuki Kuriyama ◽

Seiichi Kiyama ◽

Shigeru Noguchi ◽

Takashi Kuwahara ◽

Satoshi Ishida ◽

...

Keyword(s):

Thin Film ◽

Grain Size ◽

Excimer Laser ◽

High Performance ◽

Laser Annealing ◽

Thin Film Transistor ◽

Excimer Laser Annealing ◽

Si Thin Film

Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors

10.1143/jjap.33.2092 ◽

1994 ◽

Vol 33 (Part 1, No. 4A) ◽

pp. 2092-2099 ◽

Cited By ~ 13

Author(s):

Genshiro Kawachi ◽

Takashi Aoyama ◽

Akio Mimura ◽

Nobutake Konishi

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Excimer Laser Annealing ◽

Ion Doping ◽

Si Thin Film

Excimer Laser Annealing of PbZr0.4Ti0.6O3 Thin Film at Low Temperature

IEICE Transactions on Electronics ◽

10.1093/ietele/e89-c.10.1460 ◽

2006 ◽

Vol E89-C (10) ◽

pp. 1460-1464 ◽

Cited By ~ 1

Author(s):

W. XIANYU ◽

H. S.-y. CHO ◽

J. Y. KWON ◽

H. YIN ◽

T. NOGUCHI

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Laser Annealing ◽

Effects of Thermal Annealing on ZnO Thin-Film Transistor Characteristics and the Application of Excimer Laser Annealing in Plastic-Based ZnO Thin-Film Transistors

10.1143/jjap.48.081608 ◽

2009 ◽

Vol 48 (8) ◽

pp. 081608 ◽

Cited By ~ 11

Author(s):

Mitsuru Nakata ◽

Kazushige Takechi ◽

Toshimasa Eguchi ◽

Eisuke Tokumitsu ◽

Hirotaka Yamaguchi ◽

...

Keyword(s):

Thin Film ◽

Thermal Annealing ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Thin Film Transistor ◽

Zno Thin Film ◽

Novel Vertical Polysilicon Thin-Film Transistor with Excimer-Laser Annealing

10.7567/ssdm.2002.p2-11 ◽

2002 ◽

Author(s):

Ming-Zhen Lee ◽

Chung-Len Lee ◽

Tan-Fu Lei

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Laser Annealing ◽

Thin Film Transistor ◽

Melt-mediated coalescence of solution-deposited ZnO nanoparticles by excimer laser annealing for thin-film transistor fabrication

Applied Physics A ◽

10.1007/s00339-008-4925-0 ◽

2008 ◽

Vol 94 (1) ◽

pp. 111-115 ◽

Cited By ~ 69

Author(s):

Heng Pan ◽

Nipun Misra ◽

Seung H. Ko ◽

Costas P. Grigoropoulos ◽

Nate Miller ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Zno Nanoparticles ◽

Laser Annealing ◽

Thin Film Transistor ◽

Excimer Laser Annealing ◽

Transistor Fabrication

Impact of AC Stress in Low Temperature Polycrystalline Silicon Thin Film Transistors Produced with Different Excimer Laser Annealing Energies

IEEE Electron Device Letters ◽

10.1109/led.2021.3073200 ◽

2021 ◽

pp. 1-1

Author(s):

Yu-Zhe Zheng ◽

Chia-Chuan Wu ◽

Po-Hsun Chen ◽

Ting-Chang Chang ◽

Kuan-Ju Zhou ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Novel Vertical Polysilicon Thin-Film Transistor with Excimer-Laser Annealing

10.1143/jjap.42.2123 ◽

2003 ◽

Vol 42 (Part 1, No. 4B) ◽

pp. 2123-2126 ◽

Cited By ~ 6

Author(s):

Ming-Zhen Lee ◽

Chung-Len Lee ◽

Tan-Fu Lei

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Laser Annealing ◽

Thin Film Transistor ◽

H and Au diffusion in high mobility a-InGaZnO thin-film transistors via low temperature KrF excimer laser annealing

Applied Physics Letters ◽

10.1063/1.4979319 ◽

2017 ◽

Vol 110 (13) ◽

pp. 133503 ◽

Cited By ~ 7

Author(s):

Juan Paolo S. Bermundo ◽

Yasuaki Ishikawa ◽

Mami N. Fujii ◽

Hiroshi Ikenoue ◽

Yukiharu Uraoka

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

High Mobility ◽

Excimer Laser Annealing ◽

Krf Excimer Laser