Design and Fabrication of Dual-Trench Epitaxial Diode Array for High-Density Phase-Change Memory
2011 ◽
Vol 32
(8)
◽
pp. 1014-1016
◽
2011 ◽
Vol 50
(9S1)
◽
pp. 09MD04
◽
Keyword(s):
2012 ◽
Vol 12
(10)
◽
pp. 7939-7943
Keyword(s):
Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory
2009 ◽
Vol 9
(2)
◽
pp. 1526-1529
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 10
(11)
◽
pp. 2694-2700