Sputtering Technique to Fabricate Smooth Surface Oxide Film for Room Temperature Bonding
2011 ◽
Vol 284-286
◽
pp. 1665-1670
Keyword(s):
2019 ◽
Vol 166
(11)
◽
pp. C3376-C3388
◽
2012 ◽
Vol 258
(14)
◽
pp. 5490-5498
◽
Keyword(s):
1980 ◽
Vol 66
(7)
◽
pp. 945-952
◽
Keyword(s):
2005 ◽
Vol 241
(3-4)
◽
pp. 459-470
◽
1994 ◽
Vol 31
(6)
◽
pp. 617-619
◽
Keyword(s):
2005 ◽
Vol 46
(12)
◽
pp. 3015-3019
◽
2002 ◽
Vol 43
(12)
◽
pp. 3088-3092
◽
Keyword(s):