Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators

2010 ◽  
Author(s):  
Jin Xie ◽  
Chengkuo Lee ◽  
Ming-Fang Wang ◽  
Hanhua Feng
Keyword(s):  
Thermoelectric Power ◽  
Wafer Level ◽  
Power Generators ◽  
Vacuum Sealing ◽  
Cmos Mems

Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators

2009 ◽  
Vol 19 (12) ◽  
pp. 125029 ◽  
Author(s):  
Jin Xie ◽  
Chengkuo Lee ◽  
Ming-Fang Wang ◽  
Youhe Liu ◽  
Hanhua Feng
Keyword(s):  
Thermoelectric Power ◽  
Power Generators ◽  
Cmos Mems ◽  
Polysilicon Films ◽  
Heavily Doped

Metal-like electrical conductivity in LaxSr2−xTiMoO6 oxides for high temperature thermoelectric power generation

2017 ◽  
Vol 46 (18) ◽  
pp. 5872-5879 ◽  
Author(s):  
Mandvi Saxena ◽  
Tanmoy Maiti
Keyword(s):  
Power Generation ◽  
Electrical Conductivity ◽  
High Temperature ◽  
Energy Conversion ◽  
Thermoelectric Power ◽  
Conversion Efficiency ◽  
Energy Conversion Efficiency ◽  
Power Generators ◽  
Thermoelectric Power Generation

Increasing electrical conductivity in oxides, which are inherently insulators, can be a potential route in developing oxide-based thermoelectric power generators with higher energy conversion efficiency.

A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge

2021 ◽  
pp. 1-7
Author(s):  
Wei Xu ◽  
Xiaoyi Wang ◽  
Xiaofang Pan ◽  
Amine Bermak ◽  
Yi-Kuen Lee ◽  
...  
Keyword(s):  
Wafer Level ◽  
Vacuum Gauge ◽  
Cmos Mems

The bridge between the materials and devices of thermoelectric power generators

2017 ◽  
Vol 10 (1) ◽  
pp. 69-85 ◽  
Author(s):  
Hee Seok Kim ◽  
Weishu Liu ◽  
Zhifeng Ren
Keyword(s):  
Thermoelectric Power ◽  
Thermoelectric Performance ◽  
Power Generators ◽  
Device Reliability

BeyondZT, (ZT)engwas used as a direct indicator for thermoelectric performance to achieve a balance between material tuning and device reliability.

Flexible Bi–Te-based alloy nanosheet/PEDOT:PSS thermoelectric power generators

2019 ◽  
Vol 3 (7) ◽  
pp. 1328-1334 ◽  
Author(s):  
Yong Du ◽  
Xin Liu ◽  
Jiayue Xu ◽  
Shirley Z. Shen
Keyword(s):  
Thermoelectric Power ◽  
Nanocomposite Films ◽  
Filtration Method ◽  
Vacuum Filtration ◽  
Power Generators ◽  
Alloy Particles

Herein, Bi–Te-based alloy nanosheet/poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) thermoelectric nanocomposite films were prepared by a vacuum filtration method after exfoliating Bi–Te-based alloy particles into nanosheets.

Sign in / Sign up

Export Citation Format

Share Document