ALD Titania Sidewalls on a CMOS-MEMS Resonator Oscillator and Effects on Resonant Frequency Drift

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2019.8870899 ◽

2019 ◽

Author(s):

Yi-Chung Lin ◽

Metin G. Guney ◽

Gary K. Fedder

Keyword(s):

Resonant Frequency ◽

Frequency Drift ◽

Mems Resonator ◽

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Simulation and modeling the effect of temperature on resonant frequency of a CMOS-MEMS resonator

10.1063/1.4757433 ◽

2012 ◽

Author(s):

A. Y. Ahmed ◽

J. O. Dennis ◽

M. H. Md Khir ◽

M. N. Mohamad Saad

Keyword(s):

Resonant Frequency ◽

Effect Of Temperature ◽

Simulation And Modeling ◽

Mems Resonator ◽

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Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator

EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems ◽

10.1109/esime.2008.4525078 ◽

2008 ◽

Author(s):

Mario Gonzalez ◽

Anne Jourdain ◽

Bart Vandevelde ◽

Harrie A. C. Tilmans

Keyword(s):

Resonant Frequency ◽

Frequency Shift ◽

Thermomechanical Stress ◽

Resonant Frequency Shift ◽

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Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

2010 IEEE International Frequency Control Symposium ◽

10.1109/freq.2010.5556300 ◽

2010 ◽

Author(s):

JL. Munoz-Gamarra ◽

E. Marigo ◽

J. Giner ◽

A. Uranga ◽

F. Torres ◽

...

Keyword(s):

Electrostatic Actuation ◽

Pulsed Mode ◽

Mems Resonator ◽

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MEMS resonator with digitally tunable resonant frequency

10.1117/12.834703 ◽

2009 ◽

Author(s):

Qingquan Liu

Keyword(s):

Resonant Frequency ◽

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Theoretical modeling and FEA simulation of a CMOS-MEMS resonator

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) ◽

10.1109/rsm.2017.8069110 ◽

2017 ◽

Author(s):

A. Y. Ahmed ◽

Almur. A. S. Rabih ◽

M. H. Md Khir ◽

A. M. A. Basuwaqi ◽

J. O. Dennis

Keyword(s):

Theoretical Modeling ◽

Mems Resonator ◽

Cmos Mems ◽

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Modeling and characterization of electrostatically actuated CMOS-MEMS Resonator for magnetic field sensing

2010 International Conference on Intelligent and Advanced Systems ◽

10.1109/icias.2010.5716208 ◽

2010 ◽

Author(s):

Farooq Ahmad ◽

Ojur Dennis John ◽

Nor Hisham Hamid

Keyword(s):

Magnetic Field ◽

Electrostatically Actuated ◽

Mems Resonator ◽

Cmos Mems ◽

Field Sensing ◽

Magnetic Field Sensing

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A process-induced-frequency-drift resilient 32 kHz MEMS resonator

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/22/10/105029 ◽

2012 ◽

Vol 22 (10) ◽

pp. 105029 ◽

Author(s):

Jinghui Xu ◽

Julius Minglin Tsai

Keyword(s):

Frequency Drift ◽

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Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

2016 6th International Conference on Intelligent and Advanced Systems (ICIAS) ◽

10.1109/icias.2016.7824037 ◽

2016 ◽

Author(s):

Almur. A. S. Rabih ◽

J. O. Dennis ◽

M. H. Md Khir ◽

Mawahib Gafare Ahmed

Keyword(s):

Exhaled Breath ◽

Biomarker Detection ◽

Damping Effect ◽

Mems Resonator ◽

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A temperature control system used for improving resonant frequency drift of MEMS gyroscopes

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2015.7147452 ◽

2015 ◽

Author(s):

Rui Guan ◽

Chunhua He ◽

Dachuan Liu ◽

Qiancheng Zhao ◽

Zhenchuan Yang ◽

...

Keyword(s):

Control System ◽

Resonant Frequency ◽

Temperature Control ◽

Frequency Drift ◽

Temperature Control System ◽

Mems Gyroscopes

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A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier

2012 IEEE Sensors ◽

10.1109/icsens.2012.6411318 ◽

2012 ◽

Author(s):

Vinayak Pachkawade ◽

Cheng-Syun Li ◽

Sheng-Shian Li

Keyword(s):

Fully Differential ◽

Mems Resonator ◽

Cmos Mems ◽

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