High repetition-rate, low jitter pulsed power generator for excimer laser applications

2003 ◽  
Author(s):  
W. Jiang ◽  
T. Matsuda ◽  
K. Yatsui ◽  
A. Tokuchi
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Pulsed Power ◽  
Laser Applications ◽  
Power Generator ◽  
High Repetition ◽  
Low Jitter ◽  
Pulsed Power Generator

scholarly journals A Low-Jitter 1.8-kV 100-ps Rise-Time 50-kHz Repetition-Rate Pulsed-Power Generator

2009 ◽  
Vol 37 (9) ◽  
pp. 1855-1862 ◽  
Author(s):  
L.M. Merensky ◽  
A.F. Kardo-Sysoev ◽  
A.N. Flerov ◽  
A. Pokryvailo ◽  
D. Shmilovitz ◽  
...  
Keyword(s):  
Rise Time ◽  
Repetition Rate ◽  
Pulsed Power ◽  
Power Generator ◽  
Low Jitter ◽  
Pulsed Power Generator

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser
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