Out-of-plane CMOS-MEMS Resonator with Electrostatic Driving and Piezoresistive Sensing

2006 Sixth IEEE Conference on Nanotechnology ◽

10.1109/nano.2006.1717263 ◽

2006 ◽

Author(s):

J.C. Chiou ◽

Y.J. Lin ◽

L.J. Shieh

Keyword(s):

Mems Resonator ◽

Out Of Plane ◽

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Out-of-plane CMOS-MEMS Resonator with Electrostatic Driving and Piezoresistive Sensing

2006 Sixth IEEE Conference on Nanotechnology ◽

10.1109/nano.2006.247813 ◽

2006 ◽

Author(s):

J.C. Chiou ◽

Y.J. Lin ◽

L.J. Shieh

Keyword(s):

Mems Resonator ◽

Out Of Plane ◽

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Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

2010 IEEE International Frequency Control Symposium ◽

10.1109/freq.2010.5556300 ◽

2010 ◽

Author(s):

JL. Munoz-Gamarra ◽

E. Marigo ◽

J. Giner ◽

A. Uranga ◽

F. Torres ◽

...

Keyword(s):

Electrostatic Actuation ◽

Pulsed Mode ◽

Mems Resonator ◽

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Theoretical modeling and FEA simulation of a CMOS-MEMS resonator

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) ◽

10.1109/rsm.2017.8069110 ◽

2017 ◽

Author(s):

A. Y. Ahmed ◽

Almur. A. S. Rabih ◽

M. H. Md Khir ◽

A. M. A. Basuwaqi ◽

J. O. Dennis

Keyword(s):

Theoretical Modeling ◽

Mems Resonator ◽

Cmos Mems ◽

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Modeling and characterization of electrostatically actuated CMOS-MEMS Resonator for magnetic field sensing

2010 International Conference on Intelligent and Advanced Systems ◽

10.1109/icias.2010.5716208 ◽

2010 ◽

Author(s):

Farooq Ahmad ◽

Ojur Dennis John ◽

Nor Hisham Hamid

Keyword(s):

Magnetic Field ◽

Electrostatically Actuated ◽

Mems Resonator ◽

Cmos Mems ◽

Field Sensing ◽

Magnetic Field Sensing

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Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

2016 6th International Conference on Intelligent and Advanced Systems (ICIAS) ◽

10.1109/icias.2016.7824037 ◽

2016 ◽

Author(s):

Almur. A. S. Rabih ◽

J. O. Dennis ◽

M. H. Md Khir ◽

Mawahib Gafare Ahmed

Keyword(s):

Exhaled Breath ◽

Biomarker Detection ◽

Damping Effect ◽

Mems Resonator ◽

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A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier

2012 IEEE Sensors ◽

10.1109/icsens.2012.6411318 ◽

2012 ◽

Author(s):

Vinayak Pachkawade ◽

Cheng-Syun Li ◽

Sheng-Shian Li

Keyword(s):

Fully Differential ◽

Mems Resonator ◽

Cmos Mems ◽

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Modelling and Simulation of Polysilicon Piezoresistors in CMOS-MEMS Resonator for Biomarker Detection in Exhaled Breath

2015 6th International Conference on Intelligent Systems, Modelling and Simulation ◽

10.1109/isms.2015.27 ◽

2015 ◽

Author(s):

Almur Rabih ◽

John Dennis ◽

Haris Khir ◽

Mawahib Abdalrahman ◽

Abdelaziz Ahmed

Keyword(s):

Modelling And Simulation ◽

Exhaled Breath ◽

Biomarker Detection ◽

Mems Resonator ◽

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Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes

2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) ◽

10.1109/eftf-ifc.2013.6702251 ◽

2013 ◽

Author(s):

Ming-Huang Li ◽

Chao-Yu Chen ◽

Cheng-Syun Li ◽

Chi-Hang Chin ◽

Sheng-Shian Li

Keyword(s):

Temperature Sensitivity ◽

Mems Resonator ◽

Resonant Modes ◽

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ALD Titania Sidewalls on a CMOS-MEMS Resonator Oscillator and Effects on Resonant Frequency Drift

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2019.8870899 ◽

2019 ◽

Author(s):

Yi-Chung Lin ◽

Metin G. Guney ◽

Gary K. Fedder

Keyword(s):

Resonant Frequency ◽

Frequency Drift ◽

Mems Resonator ◽

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Linear operation of a 11MHz CMOS-MEMS resonator

2010 IEEE International Frequency Control Symposium ◽

10.1109/freq.2010.5556351 ◽

2010 ◽

Author(s):

E Marigo ◽

JL Munoz-Gamarra ◽

J Giner ◽

JL Lopez ◽

F Torres ◽

...

Keyword(s):

Linear Operation ◽

Mems Resonator ◽

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