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Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
◽
10.1109/eftf-ifc.2013.6702251
◽
2013
◽
Cited By ~ 1
Author(s):
Ming-Huang Li
◽
Chao-Yu Chen
◽
Cheng-Syun Li
◽
Chi-Hang Chin
◽
Sheng-Shian Li
Keyword(s):
Temperature Sensitivity
◽
Mems Resonator
◽
Resonant Modes
◽
Cmos Mems
Download Full-text
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Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation
2010 IEEE International Frequency Control Symposium
◽
10.1109/freq.2010.5556300
◽
2010
◽
Cited By ~ 1
Author(s):
JL. Munoz-Gamarra
◽
E. Marigo
◽
J. Giner
◽
A. Uranga
◽
F. Torres
◽
...
Keyword(s):
Electrostatic Actuation
◽
Pulsed Mode
◽
Mems Resonator
◽
Cmos Mems
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Theoretical modeling and FEA simulation of a CMOS-MEMS resonator
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)
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10.1109/rsm.2017.8069110
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2017
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Author(s):
A. Y. Ahmed
◽
Almur. A. S. Rabih
◽
M. H. Md Khir
◽
A. M. A. Basuwaqi
◽
J. O. Dennis
Keyword(s):
Theoretical Modeling
◽
Mems Resonator
◽
Cmos Mems
◽
Fea Simulation
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Modeling and characterization of electrostatically actuated CMOS-MEMS Resonator for magnetic field sensing
2010 International Conference on Intelligent and Advanced Systems
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10.1109/icias.2010.5716208
◽
2010
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Cited By ~ 2
Author(s):
Farooq Ahmad
◽
Ojur Dennis John
◽
Nor Hisham Hamid
Keyword(s):
Magnetic Field
◽
Electrostatically Actuated
◽
Mems Resonator
◽
Cmos Mems
◽
Field Sensing
◽
Magnetic Field Sensing
Download Full-text
Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
2016 6th International Conference on Intelligent and Advanced Systems (ICIAS)
◽
10.1109/icias.2016.7824037
◽
2016
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Author(s):
Almur. A. S. Rabih
◽
J. O. Dennis
◽
M. H. Md Khir
◽
Mawahib Gafare Ahmed
Keyword(s):
Exhaled Breath
◽
Biomarker Detection
◽
Damping Effect
◽
Mems Resonator
◽
Cmos Mems
Download Full-text
A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier
2012 IEEE Sensors
◽
10.1109/icsens.2012.6411318
◽
2012
◽
Cited By ~ 1
Author(s):
Vinayak Pachkawade
◽
Cheng-Syun Li
◽
Sheng-Shian Li
Keyword(s):
Fully Differential
◽
Mems Resonator
◽
Cmos Mems
◽
On Chip
Download Full-text
Out-of-plane CMOS-MEMS Resonator with Electrostatic Driving and Piezoresistive Sensing
2006 Sixth IEEE Conference on Nanotechnology
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10.1109/nano.2006.1717263
◽
2006
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Author(s):
J.C. Chiou
◽
Y.J. Lin
◽
L.J. Shieh
Keyword(s):
Mems Resonator
◽
Out Of Plane
◽
Cmos Mems
Download Full-text
Modelling and Simulation of Polysilicon Piezoresistors in CMOS-MEMS Resonator for Biomarker Detection in Exhaled Breath
2015 6th International Conference on Intelligent Systems, Modelling and Simulation
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10.1109/isms.2015.27
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2015
◽
Cited By ~ 2
Author(s):
Almur Rabih
◽
John Dennis
◽
Haris Khir
◽
Mawahib Abdalrahman
◽
Abdelaziz Ahmed
Keyword(s):
Modelling And Simulation
◽
Exhaled Breath
◽
Biomarker Detection
◽
Mems Resonator
◽
Cmos Mems
Download Full-text
ALD Titania Sidewalls on a CMOS-MEMS Resonator Oscillator and Effects on Resonant Frequency Drift
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
◽
10.1109/memsys.2019.8870899
◽
2019
◽
Cited By ~ 1
Author(s):
Yi-Chung Lin
◽
Metin G. Guney
◽
Gary K. Fedder
Keyword(s):
Resonant Frequency
◽
Frequency Drift
◽
Mems Resonator
◽
Cmos Mems
Download Full-text
Linear operation of a 11MHz CMOS-MEMS resonator
2010 IEEE International Frequency Control Symposium
◽
10.1109/freq.2010.5556351
◽
2010
◽
Cited By ~ 2
Author(s):
E Marigo
◽
JL Munoz-Gamarra
◽
J Giner
◽
JL Lopez
◽
F Torres
◽
...
Keyword(s):
Linear Operation
◽
Mems Resonator
◽
Cmos Mems
Download Full-text
A piezoresistive CMOS-MEMS resonator with high Q and low TCf
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
◽
10.1109/eftf-ifc.2013.6702247
◽
2013
◽
Author(s):
Cheng-Syun Li
◽
Ming-Huang Li
◽
Chi-Hang Chin
◽
Chao-Yu Chen
◽
Sheng-Shian Li
◽
...
Keyword(s):
High Q
◽
Mems Resonator
◽
Cmos Mems
Download Full-text
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