Monte Carlo simulation of high-energy electron beam lithography process

2013 ◽  
Author(s):  
Jiang-Yong Pan ◽  
Zai-Fa Zhou ◽  
Qi Gan ◽  
Wen-Qin Xu
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Lithography Process

scholarly journals Influence of sub-100 nm scattering on high-energy electron beam lithography

2001 ◽  
Vol 19 (6) ◽  
pp. 2504 ◽  
Author(s):  
Erik H. Anderson ◽  
Deirdre L. Olynick ◽  
Weilun Chao ◽  
Bruce Harteneck ◽  
Eugene Veklerov
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron

High-Energy Electron Beam Lithography of Octadecylphosphonic Acid Monolayers on Aluminum

Langmuir ◽  
2008 ◽  
Vol 24 (5) ◽  
pp. 2057-2063 ◽  
Author(s):  
Nikolaj Gadegaard ◽  
Xinyong Chen ◽  
Frank J. M. Rutten ◽  
Morgan R. Alexander
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Octadecylphosphonic Acid
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