Alloy liquid metal ion sources and their application in mass separated focused ion beams

Ultramicroscopy ◽

10.1016/j.ultramic.2004.11.020 ◽

2005 ◽

Vol 103 (1) ◽

pp. 59-66 ◽

Author(s):

L. Bischoff

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Beams ◽

Ion Sources ◽

Focused Ion Beams

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Energy distribution properties of focused ion beams from liquid metal ion sources

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.531550 ◽

1995 ◽

Author(s):

H.S. Uhm ◽

E.H. Choi ◽

G.S. Cho ◽

S.O. Kang

Keyword(s):

Liquid Metal ◽

Energy Distribution ◽

Metal Ion ◽

Ion Beams ◽

Ion Sources ◽

Focused Ion Beams

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P. D. Prewett and G. L. R. Mair Focused Ion Beams from Liquid Metal Ion Sources Research Studies Press. 344pp; Price £52.50; $108.70. ISBN 0863 80120X, Wiley 0471 930881. (1991).

Surface and Interface Analysis ◽

10.1002/sia.740180511 ◽

1992 ◽

Vol 18 (5) ◽

pp. 377-377 ◽

Author(s):

R. J. Young

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Beams ◽

Ion Sources ◽

Focused Ion Beams ◽

Research Studies

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Focused ion beams from liquid metal ion sources

Vacuum ◽

10.1016/0042-207x(92)90309-k ◽

1992 ◽

Vol 43 (3) ◽

pp. 272

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Beams ◽

Ion Sources ◽

Focused Ion Beams

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Alloy liquid metal ion source for carbon focused ion beams

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3253471 ◽

2009 ◽

Vol 27 (6) ◽

pp. L47 ◽

Author(s):

P. Mazarov ◽

A. D. Wieck ◽

L. Bischoff ◽

W. Pilz

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Beams ◽

Focused Ion Beams

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Direct deposition of focused ion beams with an impregnated-electrode-type liquid metal ion source

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(89)90156-0 ◽

1989 ◽

Vol 37-38 ◽

pp. 151-154 ◽

Author(s):

Junzo Ishikawa ◽

Hiroshi Tsuji ◽

Toshio Kashiwagi ◽

Yuji Aoyama ◽

Toshinori Takagi

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Beams ◽

Focused Ion Beams ◽

Direct Deposition

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ENERGY SPREADS IN FIELD EVAPORATION AND LIQUID-METAL ION SOURCES

Le Journal de Physique Colloques ◽

10.1051/jphyscol:1984930 ◽

1984 ◽

Vol 45 (C9) ◽

pp. C9-179-C9-182

Author(s):

G. L.R. Mair ◽

T. Mulvey ◽

R. G. Forbes

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

Ion Sources ◽

Field Evaporation

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In situ HVTEM observation of the tip shape of tin liquid metal ion sources

Applied Surface Science ◽

10.1016/0169-4332(95)00326-6 ◽

1996 ◽

Vol 93 (2) ◽

pp. 179-190 ◽

Author(s):

W. Driesel ◽

Ch. Dietzsch

Keyword(s):

Liquid Metal ◽

Metal Ion ◽

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Producing of Gas and Metal Ion Beams with Vacuum Arc Ion Sources

Emerging Applications of Vacuum-Arc-Produced Plasma, Ion and Electron Beams ◽

10.1007/978-94-010-0277-6_8 ◽

2002 ◽

pp. 79-90 ◽

Author(s):

A. S. Bugaev ◽

V. I. Gushenets ◽

A. G. Nikolaev ◽

E. M. Oks ◽

K. P. Savkin ◽

...

Keyword(s):

Metal Ion ◽

Ion Beams ◽

Ion Sources ◽

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SIMS with Very High Spatial Resolution Using Liquid Metal Ion Sources

Springer Series in Chemical Physics - Secondary Ion Mass Spectrometry SIMS IV ◽

10.1007/978-3-642-82256-8_39 ◽

1984 ◽

pp. 138-140 ◽

Author(s):

A. R. Waugh ◽

A. R. Bayly ◽

K. Anderson

Keyword(s):

Liquid Metal ◽

Spatial Resolution ◽

Metal Ion ◽

High Spatial Resolution ◽

Ion Sources ◽

Very High Spatial Resolution ◽

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Characteristics of Be-Si-Au Ternary Alloy Liquid Metal Ion Sources

Japanese Journal of Applied Physics ◽

10.1143/jjap.22.l692 ◽

1983 ◽

Vol 22 (Part 2, No. 11) ◽

pp. L692-L694 ◽

Author(s):

Kenji Gamo ◽

Takao Matsui ◽

Susumu Namba

Keyword(s):

Liquid Metal ◽

Ternary Alloy ◽

Metal Ion ◽

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