Novel Method of Ion Energy and Ion Energy Distribution Function Control at the Substrate during Plasma Processing
2006 ◽
Vol 15
(3)
◽
pp. 402-409
◽
2010 ◽
Vol 165
(6-10)
◽
pp. 618-625
◽
2019 ◽
Vol 37
(2)
◽
pp. 021301
◽
2016 ◽
Vol 34
(2)
◽
pp. 021303