A particle-in-cell Monte Carlo simulation of an rf discharge in methane: frequency and pressure features of the ion energy distribution function

2006 ◽  
Vol 15 (3) ◽  
pp. 402-409 ◽  
Author(s):  
O V Proshina ◽  
T V Rakhimova ◽  
A T Rakhimov
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Distribution Function ◽  
Energy Distribution ◽  
Energy Distribution Function ◽  
Rf Discharge ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Particle In Cell
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