Rapid computation of time periodic steady state for simulation of capacitively coupled RF plasma
2004 ◽
Vol 32
(2)
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pp. 399-404
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2018 ◽
Vol 115
(14)
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pp. 3569-3574
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2009 ◽
Vol 69
(1)
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pp. 87-92
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2022 ◽
Vol 389
◽
pp. 114368
2013 ◽
Vol 133
(3)
◽
pp. 271-276
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