The generation and characteristic study of large-volume microwave plasma produced with parellel rectangular waveguides

2010 ◽  
Author(s):  
Qing Zhang ◽  
Guixin Zhang ◽  
Shumin Wang ◽  
Liming Wang
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Rectangular Waveguides

A Large-Volume Open-Air Microwave Plasma Based on Parallel Multislot Rectangular Waveguides

2012 ◽  
Vol 40 (5) ◽  
pp. 1380-1385 ◽  
Author(s):  
Zhong Wang ◽  
Guixin Zhang ◽  
Qing Zhang ◽  
Zhidong Jia
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Rectangular Waveguides

Large-volume microwave plasma for energetic H-ions neutralization

2001 ◽  
Vol 43 (7) ◽  
pp. 929-944 ◽  
Author(s):  
A A Skovoroda ◽  
V A Zhil'tsov
Keyword(s):  
Large Volume ◽  
Microwave Plasma

A large volume microwave plasma source

1996 ◽  
Vol 67 (2) ◽  
pp. 455-461 ◽  
Author(s):  
Jeffrey H. Bowles ◽  
Dwight Duncan ◽  
David N. Walker ◽  
William E. Amatucci ◽  
John A. Antoniades
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

A large-volume N2–Ar microwave plasma source based on surface waves

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 343-346 ◽  
Author(s):  
C.M. Ferreira ◽  
E. Tatarova ◽  
J. Henriques ◽  
F.M. Dias
Keyword(s):  
Surface Waves ◽  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

Influence of the substrate surface on ion concentrations in a large volume microwave plasma

1997 ◽  
Vol 97 (1-3) ◽  
pp. 122-130 ◽  
Author(s):  
D. Korzec ◽  
Ch. Seibert ◽  
R. Winter ◽  
J. Engemann
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Substrate Surface ◽  
Ion Concentrations
Sign in / Sign up

Export Citation Format

Share Document