Performance of a large-volume, unmmagnetized microwave plasma facility (MPF) for industrial plasma processing applications

2005 ◽  
Author(s):  
P.D. Spence ◽  
M.S. Freeland ◽  
J.R. Roth
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Processing

Large-volume microwave plasma for energetic H-ions neutralization

2001 ◽  
Vol 43 (7) ◽  
pp. 929-944 ◽  
Author(s):  
A A Skovoroda ◽  
V A Zhil'tsov
Keyword(s):  
Large Volume ◽  
Microwave Plasma

Preparation of ultrafine γ-Fe particles by microwave plasma processing

1990 ◽  
Vol 99 (1-4) ◽  
pp. 188-191 ◽  
Author(s):  
Kenji Hayakawa ◽  
Saburo Iwama
Keyword(s):  
Microwave Plasma ◽  
Plasma Processing

A large volume microwave plasma source

1996 ◽  
Vol 67 (2) ◽  
pp. 455-461 ◽  
Author(s):  
Jeffrey H. Bowles ◽  
Dwight Duncan ◽  
David N. Walker ◽  
William E. Amatucci ◽  
John A. Antoniades
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

A Large-Volume Open-Air Microwave Plasma Based on Parallel Multislot Rectangular Waveguides

2012 ◽  
Vol 40 (5) ◽  
pp. 1380-1385 ◽  
Author(s):  
Zhong Wang ◽  
Guixin Zhang ◽  
Qing Zhang ◽  
Zhidong Jia
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Rectangular Waveguides

A large-volume N2–Ar microwave plasma source based on surface waves

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 343-346 ◽  
Author(s):  
C.M. Ferreira ◽  
E. Tatarova ◽  
J. Henriques ◽  
F.M. Dias
Keyword(s):  
Surface Waves ◽  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

Microwave Plasma Processing for VLSI Technology

1990 ◽  
Vol 7 (5-6) ◽  
pp. 328-339 ◽  
Author(s):  
S K Ray ◽  
C K Maiti ◽  
N B Chakrabarti
Keyword(s):  
Microwave Plasma ◽  
Plasma Processing ◽  
Vlsi Technology
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