A large-volume N2–Ar microwave plasma source based on surface waves

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 343-346 ◽  
Author(s):  
C.M. Ferreira ◽  
E. Tatarova ◽  
J. Henriques ◽  
F.M. Dias
Keyword(s):  
Surface Waves ◽  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

A large volume microwave plasma source

1996 ◽  
Vol 67 (2) ◽  
pp. 455-461 ◽  
Author(s):  
Jeffrey H. Bowles ◽  
Dwight Duncan ◽  
David N. Walker ◽  
William E. Amatucci ◽  
John A. Antoniades
Keyword(s):  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

2000 ◽  
Vol 18 (3) ◽  
pp. 840-848 ◽  
Author(s):  
Mutumi Tuda ◽  
Kouichi Ono ◽  
Hiroki Ootera ◽  
Masaaki Tsuchihashi ◽  
Minoru Hanazaki ◽  
...  
Keyword(s):  
Surface Waves ◽  
Microwave Plasma ◽  
Large Diameter ◽  
Plasma Source ◽  
Symmetric Surface

Simple low‐cost microwave plasma source

1986 ◽  
Vol 57 (2) ◽  
pp. 164-166 ◽  
Author(s):  
L. G. Meiners ◽  
D. B. Alford
Keyword(s):  
Microwave Plasma ◽  
Low Cost ◽  
Plasma Source
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