Parallelized two-dimensional particle-in-cell simulation for capacitively coupled plasmas using graphic processing units

2012 ◽  
Author(s):  
I. C. Song ◽  
H. W. Bae ◽  
S. W. Hwang ◽  
H. Lee ◽  
H. J. Lee
Keyword(s):  
Two Dimensional ◽  
Graphic Processing Units ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Coupled Plasmas ◽  
Graphic Processing

scholarly journals Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge

2018 ◽  
Vol 16 (6) ◽  
pp. 385-390
Author(s):  
Shikha BINWAL ◽  
Jay K JOSHI ◽  
Shantanu Kumar KARKARI ◽  
Predhiman Krishan KAW ◽  
Lekha NAIR ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Electron Temperature ◽  
Temperature Profile ◽  
Transverse Magnetic ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Higher Temperature ◽  
The Magnetic Field ◽  
Emissive Probe

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.

Sign in / Sign up

Export Citation Format

Share Document