Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge
2018 ◽
Vol 16
(6)
◽
pp. 385-390
Keyword(s):
A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed. With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.
1989 ◽
Vol 42
(1)
◽
pp. 91-110
◽
Keyword(s):
2009 ◽
Vol 27
(3)
◽
pp. 471-474
◽
Keyword(s):
2014 ◽
Vol 32
(10)
◽
pp. 1207-1216
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 45
(10)
◽
pp. 27